公开(公告)号：US20230264998A1

公开(公告)日：2023-08-24

申请号：US18172566

申请日：2023-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eunhye PARK ,  Juhui PARK ,  Seyoon KIM ,  Jiyeon LEE

IPC: C02F9/00

CPC classification number: C02F9/00 ,  C02F2201/005 ,  C02F2209/003 ,  C02F2203/006

Abstract: An ultrapure water manufacturing facility includes: a supply line connected to a pure water storage tank and in which a plurality of pure water treatment devices are sequentially arranged; a branch line branched downstream of the supply line and connected to the pure water storage tank; and a first automatic valve connected to the branch line and configured to be actuated by a double-acting actuator.