公开(公告)号：US20200271715A1

公开(公告)日：2020-08-27

申请号：US16561741

申请日：2019-09-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seon-Mi LEE ,  Sung Jin KIM ,  Ja-Hwan KU ,  Jae-Hyun KIM ,  Gilho LEE ,  Dahm YU ,  Jonghyun LIM

IPC: G01R31/26

Abstract: Disclosed are a test chamber and a test apparatus having the same. The test chamber includes a test compartment configured to support a plurality of test boards, each being configured to secure a test object. The test chamber applies a test signal to the test object. The test chamber includes an inlet side and a discharge side, and a supply duct vertically extending along a height of the test compartment. The supply duct supplies the inlet side of the test compartment with the test fluid. The test chamber includes a fluid controller to uniformly control a distribution of a test fluid in the supply duct and uniformly supply the test compartment with the test fluid. The disclosed test chamber and test apparatus provide a uniform test temperature and thereby improve a test reliability of a test object such as a semiconductor or semiconductor package.