公开(公告)号：US20240120234A1

公开(公告)日：2024-04-11

申请号：US18376862

申请日：2023-10-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joohoon KIM ,  Dongseop LEE

IPC: H01L21/687 ,  H01L21/673

CPC classification number: H01L21/68742 ,  H01L21/67309 ,  H01L21/67373

Abstract: A semiconductor manufacturing apparatus includes a first structure having a first hole, a second structure on the first structure, the second structure including a space for accommodating a substrate and a lower plate with a second hole, a first pin insertable into the first hole, the first pin having a same diameter as the first hole and a length smaller than a length of the first hole in a vertical direction, a second pin insertable into the second hole and on the first pin, the second pin having a same diameter as the second hole, a locking plate between the first pin and the second pin, the locking plate overhanging a side wall of the first pin, and a coupling member configured to couple the first pin to or separate the first pin from the second pin.

公开(公告)号：US20250076204A1

公开(公告)日：2025-03-06

申请号：US18623629

申请日：2024-04-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Hwan SEO ,  Junsuk RHO ,  Sang Woo BAE ,  Trevon James BADLOE ,  Yeseul KIM ,  Inki KIM ,  Joohoon KIM

IPC: G01N21/88 ,  G01N21/21

Abstract: An imaging system that includes a first polarization structure that polarizes light provided from a light source into first polarized light, a first power supply connected to the first polarization structure and that applies a first voltage to the first polarization structure, a meta-lens on which the first polarized light is incident, a second polarization structure that converts the first polarized light that passes through the meta-lens into second polarized light, a second power supply connected to the second polarization structure and that applies a second voltage to the second polarization structure, and an image sensor that senses the second polarized light. The first voltage and the second voltage are different from each other.