公开(公告)号：US20240253899A1

公开(公告)日：2024-08-01

申请号：US18417562

申请日：2024-01-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong Jae BANG ,  Sang June BAE ,  Dong Hun SEO ,  Hyung Sik UM ,  Jun Kyu LEE

IPC: B65G1/04

CPC classification number: B65G1/0457

Abstract: An overhead hoist transport (OHT) device is provided. The OHT device comprises a plate including a front bolt groove and a rear bolt groove which are extended and opened in a first direction, and a transport unit including a front body and a rear body, placed on the plate, wherein the transport unit comprises a front neck connector disposed on an upper face of the front bolt groove, a rear neck connector disposed on an upper face of the rear bolt groove, a front traveling wheel placed on both sides of the front body, a rear traveling wheel placed on both sides of the rear body, a front position movement drive unit which is connected to the front neck connector by a first connecting bolt passing through the front bolt groove and a rear position movement drive unit which is connected to the rear neck connector by a second connecting bolt passing through the rear bolt groove, and has the same structure as the front position movement drive unit, wherein the front position movement drive unit and the rear position movement drive unit adjust a placement state of the transport unit on the plate, depending on a load distribution state of the front traveling wheel and the rear traveling wheel.

公开(公告)号：US20240038563A1

公开(公告)日：2024-02-01

申请号：US18138771

申请日：2023-04-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jun Kyu LEE ,  Hongjin KIM ,  Jeongjae BANG

IPC: H01L21/677 ,  B65G17/20 ,  B66C19/00 ,  F16F15/08 ,  B66C13/04 ,  B66C7/12 ,  B66C9/04

CPC classification number: H01L21/67706 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  B65G17/20 ,  B66C19/00 ,  F16F15/08 ,  B66C13/04 ,  B66C7/12 ,  B66C9/04

Abstract: A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.