公开(公告)号：US20240038563A1

公开(公告)日：2024-02-01

申请号：US18138771

申请日：2023-04-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jun Kyu LEE ,  Hongjin KIM ,  Jeongjae BANG

IPC: H01L21/677 ,  B65G17/20 ,  B66C19/00 ,  F16F15/08 ,  B66C13/04 ,  B66C7/12 ,  B66C9/04

CPC classification number: H01L21/67706 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  B65G17/20 ,  B66C19/00 ,  F16F15/08 ,  B66C13/04 ,  B66C7/12 ,  B66C9/04

Abstract: A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.

公开(公告)号：US20230041221A1

公开(公告)日：2023-02-09

申请号：US17683769

申请日：2022-03-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangmin KIM ,  Youngwook KIM ,  Ginam PARK ,  Chuljun PARK ,  Jeongjae BANG ,  Jaesung BYUN ,  Yongjun AHN ,  Sangkyung LEE ,  Hyunwoo LEE ,  Junhyuk CHANG

IPC: H01L21/677 ,  B65G1/06 ,  B65G1/127

Abstract: A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.

公开(公告)号：US20220285189A1

公开(公告)日：2022-09-08

申请号：US17493198

申请日：2021-10-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangjune BAE ,  Jimin CHOI ,  Hyungsik UM ,  Jeongjae BANG ,  Hyeonhui CHO

IPC: H01L21/677 ,  F16C35/00 ,  B66C9/04 ,  B61B12/02 ,  B61B3/02

Abstract: A steering device for an OHT according to some example embodiments of the present inventive concepts includes: an LM block; a steering plate fixedly installed to the LM block and provided with an insertion groove; a link installed in the insertion groove of the steering plate and tilted; a main bearing having an outer circumferential surface in contact with the link to reduce friction when the link is tilted; and a guide roller rotatably installed on a protrusion protruding from the link.