公开(公告)号：US20210407099A1

公开(公告)日：2021-12-30

申请号：US17141770

申请日：2021-01-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sunghee Lee ,  Kyubaik Chang

IPC: G06T7/155 ,  G06T7/00

Abstract: A method for detecting a defect on a substrate, including receiving a first image, generating a second image, by converting the first image to grayscale levels, calculating a first gray level value, having a maximum number of pixels in the second image, and second and third gray level values, having a number of pixels in the second image equal to a predetermined fraction of the first gray level value, from a histogram of the number of pixels respective to the grayscale levels of the second image, converting the second image into a third image having pixels at a level lower than that of the first gray level value and a fourth image having pixels at a level equal to or higher than the first gray level value, generating fifth and sixth images by detecting edges by applying a Canny algorithm to the third and fourth images, respectively.

公开(公告)号：US11587235B2

公开(公告)日：2023-02-21

申请号：US17141770

申请日：2021-01-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sunghee Lee ,  Kyubaik Chang

IPC: G06T7/13 ,  G06T7/00 ,  G06T7/136 ,  G06T7/155

Abstract: A method for detecting a defect on a substrate, including receiving a first image, generating a second image, by converting the first image to grayscale levels, calculating a first gray level value, having a maximum number of pixels in the second image, and second and third gray level values, having a number of pixels in the second image equal to a predetermined fraction of the first gray level value, from a histogram of the number of pixels respective to the grayscale levels of the second image, converting the second image into a third image having pixels at a level lower than that of the first gray level value and a fourth image having pixels at a level equal to or higher than the first gray level value, generating fifth and sixth images by detecting edges by applying a Canny algorithm to the third and fourth images, respectively.