公开(公告)号：US20220074867A1

公开(公告)日：2022-03-10

申请号：US17225275

申请日：2021-04-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jaehwang Jung ,  Hyejin Shin ,  Wookrae Kim ,  Gwangsik Park ,  Myungjun Lee ,  Yongju Jeon

IPC: G01N21/95 ,  G01B11/25

Abstract: An imaging apparatus includes a light source configured to generate and output light, a stage having a measurement target thereon, a line-scan spectral imaging (SI) optical system configured to measure the measurement target using a first scale and to slopingly irradiate the light from the light source onto the measurement target in a line beam shape, divide light reflected by the measurement target, and perform imaging of the divided light, and an angle-resolved SI optical system configured to measure the measurement target at a second scale that is smaller than the first scale and configured to divide the light from the light source into monochromatic light, slopingly irradiate the monochromatic light onto the measurement target by using a reflective objective lens, and perform imaging of light reflected by the measurement target.

公开(公告)号：US11726046B2

公开(公告)日：2023-08-15

申请号：US17225275

申请日：2021-04-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jaehwang Jung ,  Hyejin Shin ,  Wookrae Kim ,  Gwangsik Park ,  Myungjun Lee ,  Yongju Jeon

IPC: G01N21/95 ,  G01B11/25

CPC classification number: G01N21/9501 ,  G01B11/254 ,  G01B2210/56

Abstract: An imaging apparatus includes a light source configured to generate and output light, a stage having a measurement target thereon, a line-scan spectral imaging (SI) optical system configured to measure the measurement target using a first scale and to slopingly irradiate the light from the light source onto the measurement target in a line beam shape, divide light reflected by the measurement target, and perform imaging of the divided light, and an angle-resolved SI optical system configured to measure the measurement target at a second scale that is smaller than the first scale and configured to divide the light from the light source into monochromatic light, slopingly irradiate the monochromatic light onto the measurement target by using a reflective objective lens, and perform imaging of light reflected by the measurement target.