公开(公告)号：US20230213474A1

公开(公告)日：2023-07-06

申请号：US17682979

申请日：2022-02-28

Applicant: Shanghai Tianma Micro-Electronics Co., Ltd.

Inventor： Kaidi ZHANG ,  Baiquan LIN ,  Huihui JIANG ,  Luning YANG ,  Wei LI ,  Yunfei BAI ,  Zhenyu JIA ,  Kerui XI ,  Feng QIN

IPC: G01N27/414 ,  G01N27/333 ,  H01L21/768

CPC classification number: G01N27/414 ,  G01N27/333 ,  H01L21/76829

Abstract: A detection device and a detection method are provided. The detection device includes at least one detection unit. The detection unit includes a first transistor, a second transistor, a third transistor and a fourth transistor that are electrically connected to each other, a gate is disposed above a channel of each of the first transistor, the second transistor, and the third transistor, and an ion-sensitive membrane is covered above a channel of the fourth transistor. The detection device also includes a first voltage signal terminal, a second voltage signal terminal, and a third voltage signal terminal. Further, the detection device includes a first power supply terminal, a first potential output terminal, a second potential output terminal, and a second power supply terminal.