公开(公告)号：US12145839B1

公开(公告)日：2024-11-19

申请号：US18595030

申请日：2024-03-04

Applicant: Sheba Microsystems Inc.

Inventor： Faez Ba-Tis ,  Ahmed Galaom ,  Ali Banss ,  Hui Zuo

IPC: B81B7/00

Abstract: A MEMS actuator assembly package features a number of drop test resistant mechanisms is disclosed. These mechanisms are used to decelerate and finally stops the heavy load of the image sensor attached to the MEMS actuators along all six directions of the in-plane and out-of-plane axes (±x, ±y, ±z). The MEMS actuator assembly package comprises first and second sets of flexible stoppers attached to the MEMS actuator along with a set of hard stoppers that engage in a sequential manner with the moving mass of the loaded actuator to decelerate it, bringing it to a complete stop when exposed to mechanical shock along the four directions of the in-plane axes (x and y). When the assembly package is exposed along the positive and negative direction of the z-axis, the moving mass is stopped by features built in the package.