公开(公告)号：US10965848B1

公开(公告)日：2021-03-30

申请号：US17108945

申请日：2020-12-01

Applicant: Sheba Microsystems Inc.

Inventor： Faez Ba-Tis

IPC: H04N5/232 ,  H04N5/225 ,  H02N1/00

Abstract: A MEMS electrostatic actuator that achieves autofocus and super resolution imaging in cameras is disclosed. The actuator is able to provide multi-degrees of freedom motion (of up to 5-degrees-of-freedom). It consists of a moving and fixed parts. The moving part comprises an inner and outer rotor. The inner rotor contains a load stage and the moving plates of the parallel-plate electrodes and is attached to the outer rotor via a plurality of mechanical springs. The outer rotor holds the inner rotor and contains a plurality of openings or tubes surrounded by walls and are attached to the outer periphery of the actuator via multiple mechanical springs. The present device can be used to achieve super resolution functionality in compact cameras.

公开(公告)号：US12145839B1

公开(公告)日：2024-11-19

申请号：US18595030

申请日：2024-03-04

Applicant: Sheba Microsystems Inc.

Inventor： Faez Ba-Tis ,  Ahmed Galaom ,  Ali Banss ,  Hui Zuo

IPC: B81B7/00

Abstract: A MEMS actuator assembly package features a number of drop test resistant mechanisms is disclosed. These mechanisms are used to decelerate and finally stops the heavy load of the image sensor attached to the MEMS actuators along all six directions of the in-plane and out-of-plane axes (±x, ±y, ±z). The MEMS actuator assembly package comprises first and second sets of flexible stoppers attached to the MEMS actuator along with a set of hard stoppers that engage in a sequential manner with the moving mass of the loaded actuator to decelerate it, bringing it to a complete stop when exposed to mechanical shock along the four directions of the in-plane axes (x and y). When the assembly package is exposed along the positive and negative direction of the z-axis, the moving mass is stopped by features built in the package.

公开(公告)号：US11708263B2

公开(公告)日：2023-07-25

申请号：US17313565

申请日：2021-05-06

Applicant: Sheba Microsystems Inc.

Inventor： Faez Ba-Tis ,  Ahmed Galaom ,  Ridha Ben-Mrad

IPC: B81B3/00 ,  B81C1/00 ,  G02B5/20 ,  G02B7/02 ,  H02N1/00 ,  H04N23/52 ,  H04N23/54

CPC classification number: B81B3/0081 ,  B81C1/0069 ,  G02B5/208 ,  G02B7/02 ,  H02N1/006 ,  H04N23/52 ,  H04N23/54 ,  B81B2201/03 ,  B81B2203/0163 ,  B81B2207/07

Abstract: A camera system incorporating a MEMS actuator to achieve focus adjustments to compensate for the thermal expansion of the lens assembly is disclosed. The camera comprises a lens barrel, lens holder, infra-red (IR) filter, board circuit, MEMS actuator, housing package for the actuator, and an image sensor. The image sensor is directly wire bonded to pads on the circuit board such that these pads are movable at the image sensor end and fixed at the circuit board end. When the camera is exposed to temperature variations, the MEMS actuator moves the sensor along the optical axis to maintain the image in focus.