公开(公告)号：US20180102264A1

公开(公告)日：2018-04-12

申请号：US15728953

申请日：2017-10-10

Applicant: Soitec

Inventor： Didier Landru ,  Oleg Kononchuk ,  Sébastien Simon

IPC: H01L21/67 ,  H01L21/677 ,  F27D7/06 ,  F27D5/00

Abstract: A thermal treatment system includes a chamber capable of receiving a plurality of substrates, a gas intake path in a distal portion of the chamber located opposite an area for entry of substrates into the chamber, and an outlet path for the gas and/or volatile species generated during the thermal treatment. The outlet path is located in a proximal portion of the chamber located near the area for entry of the substrates into the chamber. The system further includes a collector device in the proximal portion of the chamber. The collector device has a confinement opening oriented toward the distal portion of the chamber, and the collector device defines a compartment communicating with the outlet path, the compartment being configured so that the gas and the volatile species enter into the compartment via the confinement opening and pass through the compartment to reach the outlet path.

公开(公告)号：US10510565B2

公开(公告)日：2019-12-17

申请号：US15728953

申请日：2017-10-10

Applicant: Soitec

Inventor： Didier Landru ,  Oleg Kononchuk ,  Sébastien Simon

IPC: H01L21/67 ,  F27D5/00 ,  F27D7/06 ,  H01L21/677 ,  H01L21/762

Abstract: A thermal treatment system includes a chamber capable of receiving a plurality of substrates, a gas intake path in a distal portion of the chamber located opposite an area for entry of substrates into the chamber, and an outlet path for the gas and/or volatile species generated during the thermal treatment. The outlet path is located in a proximal portion of the chamber located near the area for entry of the substrates into the chamber. The system further includes a collector device in the proximal portion of the chamber. The collector device has a confinement opening oriented toward the distal portion of the chamber, and the collector device defines a compartment communicating with the outlet path, the compartment being configured so that the gas and the volatile species enter into the compartment via the confinement opening and pass through the compartment to reach the outlet path.