Dispersion containing pyrogenically manufactured abrasive particles with superparamagnetic domains
    3.
    发明授权
    Dispersion containing pyrogenically manufactured abrasive particles with superparamagnetic domains 失效
    含有热原制造的具有超顺磁畴的磨料颗粒的分散体

    公开(公告)号:US06761747B2

    公开(公告)日:2004-07-13

    申请号:US10278846

    申请日:2002-10-24

    IPC分类号: C09G102

    摘要: An aqueous dispersion containing abrasive particles comprises abrasive particles having superparamagnetic metal oxide domains in a non-magnetic metal oxide or non-metal oxide matrix. The abrasive particles of the aqueous dispersion can have an average particle size of below 400 nm and a BET surface area of 50 to 600 m2/g. The dispersion can be produced by dispersing the abrasive particles with an energy of at least 200 kJ/m3 using a device in which the abrasive particles are first subjected to high pressure, then decompressed through a nozzle so that the abrasive particles collide with one another or against sections of wall in the device. The aqueous dispersion can be used for chemical mechanical polishing (CMP).

    摘要翻译: 含有磨料颗粒的含水分散体包括在非磁性金属氧化物或非金属氧化物基质中具有超顺磁性金属氧化物畴的磨粒。 水性分散体的研磨颗粒的平均粒径可以在400nm以下,BET表面积为50〜600m 2 / g。 分散体可以通过使用其中研磨颗粒首先经受高压的装置分散具有至少200kJ / m 3的能量的磨料颗粒,然后通过喷嘴减压使得磨料颗粒与 彼此或相对于设备中的墙壁部分。 水性分散体可用于化学机械抛光(CMP)。