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公开(公告)号：US20230134102A1
公开(公告)日：2023-05-04
申请号：US17514313
申请日：2021-10-29
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Stephen Arlon Meisner , James Thomas Hallowell , Michael Todd Wyant
IPC: H01L23/544
Abstract: A photo alignment structure is provided that includes a wafer having scribe lines defined therein in a top planar surface of the wafer. An alignment structure is disposed on a top planar surface of the wafer longitudinally aligned with a portion of selected scribe lines, where the alignment structure is comprised of metal layers. A slot is defined along a longitudinal axis of the alignment structure in at least one of the metal layers.
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