公开(公告)号：US20220326508A1

公开(公告)日：2022-10-13

申请号：US17808309

申请日：2022-06-23

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Lucius M. Sherwin ,  Jesse Yuan ,  Noppawan Boorananut

IPC: G02B26/08

Abstract: A method includes forming a first aluminum silicon layer on a metal layer and forming a titanium nitride layer (or other titanium-based layer) on a surface of the aluminum-silicon layer opposite the metal layer. The method further includes etching the titanium nitride layer to create a titanium nitride pad and forming a torsion hinge in the metal layer. The titanium nitride pad is on the torsion hinge. The method also includes depositing a sacrificial layer over the torsion hinge and titanium nitride pad, forming a via in the sacrificial layer from a surface of the sacrificial layer opposite the torsion hinge to the titanium nitride pad, depositing a metal mirror layer on a surface of the sacrificial layer opposite the torsion hinge and into the via, and removing the sacrificial layer.

公开(公告)号：US11703678B2

公开(公告)日：2023-07-18

申请号：US17808309

申请日：2022-06-23

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Lucius M. Sherwin ,  Jesse Yuan ,  Noppawan Boorananut

IPC: G02B26/08

CPC classification number: G02B26/0833

Abstract: A method includes forming a first aluminum silicon layer on a metal layer and forming a titanium nitride layer (or other titanium-based layer) on a surface of the aluminum-silicon layer opposite the metal layer. The method further includes etching the titanium nitride layer to create a titanium nitride pad and forming a torsion hinge in the metal layer. The titanium nitride pad is on the torsion hinge. The method also includes depositing a sacrificial layer over the torsion hinge and titanium nitride pad, forming a via in the sacrificial layer from a surface of the sacrificial layer opposite the torsion hinge to the titanium nitride pad, depositing a metal mirror layer on a surface of the sacrificial layer opposite the torsion hinge and into the via, and removing the sacrificial layer.

公开(公告)号：US11409098B2

公开(公告)日：2022-08-09

申请号：US15818973

申请日：2017-11-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Lucius M. Sherwin ,  Jesse Yuan ,  Noppawan Boorananut

IPC: G02B26/08

Abstract: A method includes forming a first aluminum silicon layer on a metal layer and forming a titanium nitride layer (or other titanium-based layer) on a surface of the aluminum-silicon layer opposite the metal layer. The method further includes etching the titanium nitride layer to create a titanium nitride pad and forming a torsion hinge in the metal layer. The titanium nitride pad is on the torsion hinge. The method also includes depositing a sacrificial layer over the torsion hinge and titanium nitride pad, forming a via in the sacrificial layer from a surface of the sacrificial layer opposite the torsion hinge to the titanium nitride pad, depositing a metal mirror layer on a surface of the sacrificial layer opposite the torsion hinge and into the via, and removing the sacrificial layer.