公开(公告)号：US06535371B1

公开(公告)日：2003-03-18

申请号：US09299807

申请日：1999-04-26

申请人： Takashi Kayamoto ,  Toshihiko Hanamachi ,  Tadashi Inokuchi ,  Ryusuke Adachi

发明人： Takashi Kayamoto ,  Toshihiko Hanamachi ,  Tadashi Inokuchi ,  Ryusuke Adachi

IPC分类号： H02H2300

CPC分类号： H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H05B3/143

摘要： A combination of a ceramic layer essentially consisting of magnesia ceramic material and a metallic layer is proposed for a layered assembly for use in applications such as electrostatic chucks which are subjected to thermal stress. A combination of magnesia ceramic material and ferritic stainless steel is preferred because of the similarities of the thermal expansion coefficients of these materials. When a larger difference in the thermal expansion coefficients exists between the selected combination of materials, a damper layer having an intermediate thermal expansion coefficient may be used so as to accommodate the difference in the thermal expansion of the two layers.

摘要翻译： 提出了一种基本上由氧化镁陶瓷材料和金属层组成的陶瓷层的组合用于分层组件，用于诸如受到热应力的静电卡盘的应用。 由于这些材料的热膨胀系数的相似性，因此优选氧化镁陶瓷材料和铁素体不锈钢的组合。 当选择的材料组合之间存在较大的热膨胀系数差时，可以使用具有中间热膨胀系数的阻尼层，以适应两层热膨胀的差异。

公开(公告)号：US5043117A

公开(公告)日：1991-08-27

申请号：US262522

申请日：1988-10-25

申请人： Takaji Adachi ,  Masahiko Nakatani ,  Shigemi Sato ,  Toyoyuki Higashino ,  Suguru Nomura ,  Ryusuke Adachi

发明人： Takaji Adachi ,  Masahiko Nakatani ,  Shigemi Sato ,  Toyoyuki Higashino ,  Suguru Nomura ,  Ryusuke Adachi

IPC分类号： B28B1/30 ,  B28B3/00 ,  B28B11/10 ,  C04B35/634 ,  C04B35/636

CPC分类号： C04B35/63416 ,  C04B35/634 ,  C04B35/6342 ,  C04B35/63424 ,  C04B35/63456 ,  C04B35/6365

摘要： A method of manufacturing ceramic products. This method comprises the steps of mixing ceramic powder, organic materials imparting formability to the ceramic powder, and a first solvent, thereby preparing a mixture, shaping the mixture thereby forming a product of a simple shape, drying the product, immersing the dried product in a bath of a second solvent, thereby plasticizing the product, and re-shaping the plasticized product.

摘要翻译： 陶瓷制品的制造方法。 该方法包括以下步骤：将陶瓷粉末，赋予陶瓷粉末的成型性的有机材料和第一溶剂混合，由此制备混合物，使混合物成型，形成简单形状的产品，干燥产品，将干燥产品浸入 第二溶剂的浴，从而使产品增塑，并重塑塑化产品。