公开(公告)号：US09372079B1

公开(公告)日：2016-06-21

申请号：US14582534

申请日：2014-12-24

申请人： Tay-Chang Wu ,  Jaime Duran ,  John Christopher Boney ,  Shawn David McDermed ,  Joanna Schmit ,  Son Hoang Bui ,  Matthew Jarrod Novak

发明人： Tay-Chang Wu ,  Jaime Duran ,  John Christopher Boney ,  Shawn David McDermed ,  Joanna Schmit ,  Son Hoang Bui ,  Matthew Jarrod Novak

IPC分类号： G01B5/008 ,  G01B21/04 ,  G01B11/00

CPC分类号： G01B21/042 ,  G01B3/30 ,  G01B11/005 ,  G01B11/2441

摘要： A coordinate measuring machine is calibrated by taking optical measurements of an optical flat that includes a grating placed on its surface. The arm of the CMM capable of multi-directional translation in relation to an object is fitted with a white-light interferometric objective and optical measurements are taken of the flat while translating the objective (or the flat) in the coordinate direction subject to calibration. The objective may serve also as the probe of the CMM.

摘要翻译： 通过对包括放置在其表面上的光栅的光学平面进行光学测量来校准坐标测量机。 能够相对于物体进行多向平移的CMM的臂装配有白光干涉物镜，并且在校准时沿坐标方向平移物镜（或平面）进行光学测量。 目标也可以作为CMM的探测器。

公开(公告)号：US09746315B1

公开(公告)日：2017-08-29

申请号：US14733092

申请日：2015-06-08

申请人： Joanna Schmit ,  Son Hoang Bui ,  Dong Chen ,  Matthew Jarrod Novak

发明人： Joanna Schmit ,  Son Hoang Bui ,  Dong Chen ,  Matthew Jarrod Novak

IPC分类号： G01B9/02 ,  G01B11/24

CPC分类号： G01B11/2441 ,  G02B21/0056 ,  H04N13/254

摘要： Side illumination is combined with scanning interferometry to provide a means for measuring with a single data-acquisition scan surfaces that contain sections suitable for interferometric processing as well as sections that are not suitable because of lack of fringes produced by the measurement. In the sections where no fringes are produced, the irradiance detected during the scan is processed using a depth-from-focus mapping method to yield a corresponding measurement. The result is a complete profilometric measurement of the sample surface with a single scan. In addition, by increasing sample irradiance through side illumination, the structural features of the sample become markedly more visible than when illuminated only by the object beam of the interferometer, which greatly facilitates finding focus and identifying regions of interest for the measurement.