公开(公告)号：US12123702B1

公开(公告)日：2024-10-22

申请号：US17402269

申请日：2021-08-13

Applicant: RENU ROBOTICS CORP.

Inventor： Tim Alan Matus ,  Michael Odell Blanton, Jr. ,  Kristopher Charles Kozak ,  Marc Christopher Alban

IPC: A01D34/00 ,  G01B11/24 ,  G01B11/245 ,  G01D5/353 ,  G02B6/02 ,  G02B6/04

CPC classification number: G01B11/245 ,  G01B11/2441 ,  G01D5/35316 ,  G02B6/02076 ,  G02B6/04

Abstract: Disclosed are solutions for proactively sensing the condition of the ground in the path of the autonomous vehicle in order to mitigate the risks of an autonomous vehicle encountering troublesome terrain, navigation obstacles, and other potential risks to the continued uninterrupted operation of said autonomous vehicle. Accordingly, various implementations disclosed herein are directed to the use of ground analysis sensors to assist in the detection of navigationally difficult terrain including, for example, the use of cantilevered sensors operating well in front of the autonomous vehicle's front wheels (drive wheels or otherwise).

公开(公告)号：US12123699B1

公开(公告)日：2024-10-22

申请号：US18632298

申请日：2024-04-11

Applicant: WUXI XIVI SCIENCE AND TECHNOLOGY CO., LTD.

Inventor： Minjie Lu ,  Zhaokun Wang

IPC: G01B11/02 ,  G01B11/06 ,  G01B11/24 ,  H04N23/695

CPC classification number: G01B11/022 ,  G01B11/06 ,  G01B11/2441 ,  H04N23/695

Abstract: A system for detecting a thickness and a bow of a large-sized wafer and a method for detecting a thickness and a bow of a large-sized wafer are provided and relate to wafer detection, the system includes a transportation mechanism, a handling mechanism and a detection mechanism. The transportation mechanism includes a transportation belt and is configured to transport the wafer. The handling mechanism includes a mechanical arm, an end of the mechanical arm is provided with multiple vacuum suction cups, and the handling mechanism is configured to transport the wafer from the handling mechanism to the detection mechanism. The detection mechanism includes a bearing structure and an optical detection structure, and is configured to detect the thickness and the bow of the wafer. The bearing structure includes multiple strings configured to bear the wafer. The optical detection structure includes a camera and a liquid crystal display (LCD) panel.

公开(公告)号：US20240302158A1

公开(公告)日：2024-09-12

申请号：US18507663

申请日：2023-11-13

Applicant: California Institute of Technology

Inventor： Joshua Brake ,  Jian Xu ,  Changhuei Yang

IPC: G01B9/02055 ,  G01B9/02015 ,  G01B11/24

CPC classification number: G01B9/02082 ,  G01B9/02024 ,  G01B11/2441

Abstract: Interferometric speckle visibility spectroscopy methods, systems, and non-transitory computer readable media for recovering sample speckle field data or a speckle field pattern from an off-axis interferogram recorded by one or more sensors over an exposure time and determining sample dynamics of a sample being analyzed from speckle statistics of the speckle field data or the speckle field pattern.

公开(公告)号：US20240125594A1

公开(公告)日：2024-04-18

申请号：US17769543

申请日：2020-10-16

Applicant: VIRELUX Inspection Systems Sàrl

Inventor： Tom Reichert ,  Gérard Baseotto

IPC: G01B11/25 ,  G01B5/00 ,  G01B11/16 ,  G01B11/24

CPC classification number: G01B11/2545 ,  G01B5/0025 ,  G01B11/167 ,  G01B11/2441 ,  G01N2021/8864 ,  G01N2201/0631

Abstract: A method and system for scanning an outer surface of a three-dimensional object, the outer surface being reflective, the method comprising the following steps: (a) projecting a light pattern on the object with a relative movement between the light pattern and the object; (b) recording with cameras images of the light pattern reflected by the outer surface during the relative movement; (c) processing the recorded reflection images by identifying the outline of the light pattern and determining from the outline characteristics of the outer surface; wherein the light pattern comprises at least one homogenously illuminated strip extending transversally to a direction of the relative movement with at least one border with a non-straight profile so as to form a non-constant width of the strip; and in step (c) the speed of the relative movement is taken into account for determining a three-dimensional definition of the outer surface.

公开(公告)号：US11927500B2

公开(公告)日：2024-03-12

申请号：US17720344

申请日：2022-04-14

Applicant: Carl Zeiss SMT GmbH

Inventor： Steffen Siegler ,  Johannes Ruoff ,  Alexander Wolf ,  Michael Carl ,  Toralf Gruner ,  Thomas Schicketanz

IPC: G01M11/00 ,  G01B9/02 ,  G01B9/02001 ,  G01B11/24

CPC classification number: G01M11/005 ,  G01B9/02011 ,  G01B9/02039 ,  G01B11/2441

Abstract: Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.

公开(公告)号：US11925435B2

公开(公告)日：2024-03-12

申请号：US17836606

申请日：2022-06-09

Applicant: D4D Technologies, LLC

Inventor： Ye Li ,  Justin G. Graham ,  Rod A. Duncan ,  Greg R. Basile ,  Grant E. Kenworthy ,  Henley S. Quadling ,  Mark S. Quadling ,  Glen Freeman

IPC: A61B5/00 ,  A61C9/00 ,  G01B9/02004 ,  G01B9/02091 ,  G01B11/24

CPC classification number: A61B5/0088 ,  A61B5/0066 ,  A61C9/0053 ,  G01B9/02004 ,  G01B9/02091 ,  G01B11/2441

Abstract: An intra-oral scanning device includes a light source and an optical system, and communicates with a display system. The device provides for more efficient transmission and capture of images. It integrates OCT scanning with RGB-based scanning. In operation, the device is used for recording topological characteristics of teeth, dental impressions, or stone models by digital methods and for use in CAD/CAM of dental restorative prosthetic devices. To that end, the RGB-based scan obtains surface data (e.g., a margin), while the OCT scan penetrates the surface. The two scanners operate from within the same physical housing and preferably at the same time such that only one scanning pass (to obtain all necessary data) is required. The 3D data obtained from the OCT scan is registered with the 3D data obtained from the RGB-based scan by virtue of being captured using a common return path. Preferably, the 3D surface data is used to align the volume data, such that the OCT scan operates over a much sparser scanning volume than would otherwise be required if the OCT scan were carried out separately. In this manner, there is less stitching of data required to build the output images, thereby enabling a “one-pass” operation.

公开(公告)号：US20240068798A1

公开(公告)日：2024-02-29

申请号：US18237527

申请日：2023-08-24

Applicant: Tokyo Seimitsu Co., Ltd.

Inventor： Tasuku SHIMIZU

IPC: G01B11/00 ,  G01B5/008 ,  G01B11/24

CPC classification number: G01B11/005 ,  G01B5/008 ,  G01B11/2441

Abstract: A measuring device includes a table on which a workpiece is to be mounted, a first imaging unit configured to image the surface of the workpiece on the table, a second imaging unit configured to image the surface of the workpiece on the table, the second imaging unit allowing measurement of a shape and/or roughness of the surface of the workpiece according to a plurality of images taken by scanning the surface of the workpiece in a Z-axis direction, and an image processing unit configured to process the image of the surface of the workpiece taken by the first imaging unit and the plurality of images taken by scanning the surface of the workpiece in the Z-axis direction by the second imaging unit, so as to measure the shape and/or the roughness of the surface of the workpiece.

公开(公告)号：US11892283B2

公开(公告)日：2024-02-06

申请号：US17708409

申请日：2022-03-30

Applicant: Carl Zeiss SMT GmbH

Inventor： Stefan Schulte ,  Rolf Freimann

IPC: G01B11/24 ,  G01B9/02 ,  G01M11/00 ,  G01B9/02055 ,  G01M11/02 ,  G02B5/08

CPC classification number: G01B11/2441 ,  G01B9/02039 ,  G01B9/02072 ,  G01M11/005 ,  G01M11/0271 ,  G02B5/0891

Abstract: A measurement apparatus (10) for interferometrically determining a surface shape of a test object (14). A radiation source provides an input wave (42), a multiply-encoded diffractive optical element (60), which is configured to produce by diffraction from the input wave a test wave (66) that is directed at the test object and has a wavefront in the form of a free-form surface and at least one calibration wave (70), and a capture device (46). The calibration wave has a wavefront with a non-rotationally symmetric shape (68f), wherein cross sections through the wavefront of the calibration wave along cross-sectional surfaces each aligned transversely to one another have a curved shape. The curved shapes in the different cross-sectional surfaces differ in terms of an opening parameter. The capture device (46) captures a calibration interferogram formed by superimposing a reference wave (40) with the calibration wave after interaction with a calibration object (74).

公开(公告)号：US20230375463A1

公开(公告)日：2023-11-23

申请号：US18082040

申请日：2022-12-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seoyeon JEONG ,  Seungwoo LEE ,  Inho SHIN ,  Wookrae KIM ,  Myungjun LEE ,  Jaehwang JUNG

IPC: G01N21/21 ,  G02B27/28 ,  G01N21/956 ,  G01B11/24

CPC classification number: G01N21/211 ,  G02B27/283 ,  G01N21/956 ,  G01B11/2441 ,  G01B2210/56

Abstract: A semiconductor measurement apparatus includes an illumination unit configured to provide illumination light including linearly polarized light beams having different wavelengths, an optical unit including an objective lens configured to allow the illumination light to be incident on a sample, the optical unit being configured to transmit reflection light generated when the illumination light is reflected from the sample, a self-interference generator configured to self-interfere the reflection light transmitted from the optical unit and transmit the reflection light to a first image sensor, for each wavelength, and a controller. The controller is configured to process a measurement image output by the image sensor to divide the measurement image into a first image representing an intensity ratio of a polarization component of the reflection light and a second image representing a phase difference of the polarization component of the reflection light, for each wavelength.

公开(公告)号：US20230243643A1

公开(公告)日：2023-08-03

申请号：US18295845

申请日：2023-04-05

Applicant: CKD CORPORATION

Inventor： Hiroyuki Ishigaki ,  Tomoru Okada ,  Ikuo Futamura

IPC: G01B11/24 ,  G01B9/02015 ,  G01B9/02 ,  G01B9/02001

CPC classification number: G01B11/2441 ,  G01B9/0203 ,  G01B9/02024 ,  G01B9/02083 ,  G01B9/02007 ,  G01B2290/70

Abstract: A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.