公开(公告)号：US20190064106A1

公开(公告)日：2019-02-28

申请号：US16106598

申请日：2018-08-21

Applicant: Technion Research and Development Foundation LTD.

Inventor： YAEL NEMIROSKY

IPC: G01N27/414 ,  G01J5/02 ,  H01L27/144 ,  G01J5/04

Abstract: A gas sensing device, that may include a suspended gas sensing element, a frame that supports the suspended gas sensing element, and one or more traps for trapping at least one out of Siloxane and silicon dioxide. The suspended gas sensing element may include a gas reactive element that has a gas dependent temperature parameter, and a semiconductor temperature sensing element that is thermally coupled to the gas reactive element, and is configured to generate detection signals that are responsive to a temperature of the gas reactive element. The gas reactive element and the semiconductor temperature sensing element are of microscopic scale.