公开(公告)号：US10109597B2

公开(公告)日：2018-10-23

申请号：US14536897

申请日：2014-11-10

Applicant: Texas Instruments Incorporated

Inventor： Jeffrey Alan West ,  Thomas D. Bonifield ,  Basab Chatterjee

IPC: H01L23/544 ,  H01L23/00 ,  H01L23/58

Abstract: An integrated circuit containing a crack deflecting scribe seal which separates an interior region of the integrated circuit from a scribeline immediately outside the integrated circuit and a method of forming the same. The crack deflecting scribe seal includes continuous metal layers and continuous contacts and continuous vias between the continuous metal layers. The continuous metal layers do not extend past the continuous contacts and continuous vias. The continuous contacts and continuous vias are recessed from edges of the underlying continuous metal layers on the scribeline side of the scribe seal, providing an angled outer surface on the scribe seal which may desirably terminate crack propagation or deflect crack propagation upward to a top surface of the scribeline or the crack deflecting scribe seal.