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公开(公告)号:US20140203388A1
公开(公告)日:2014-07-24
申请号:US14157891
申请日:2014-01-17
Applicant: Texas Instruments Incorporated
Inventor: James BECKER , Henry Litzmann EDWARDS
IPC: H01L31/0232 , H01L31/18
CPC classification number: H01L31/02327 , H01L31/02024 , H01L31/103
Abstract: An optical sensor includes a semiconductor substrate having a first conductive type. The optical sensor further includes a photodiode disposed on the semiconductor substrate and a metal layer. The photodiode includes a first semiconductor layer having the first conductive type and a second semiconductor layer, formed on the first semiconductor layer, including a plurality of cathodes having a second conductive type. The first semiconductor layer is configured to collect photocurrent upon reception of incident light. The cathodes are configured to be electrically connected to the first semiconductor layer and the second semiconductor layer is configured to, based on the collected photocurrent, to track the incident light. The metal layer further includes a pinhole configured to collimate the incident light, and the plurality of cathodes form a rotational symmetry of order n with respect to an axis of the pinhole
Abstract translation: 光学传感器包括具有第一导电类型的半导体衬底。 光学传感器还包括设置在半导体衬底上的光电二极管和金属层。 光电二极管包括具有第一导电类型的第一半导体层和形成在第一半导体层上的第二半导体层,其包括具有第二导电类型的多个阴极。 第一半导体层被配置为在接收到入射光时收集光电流。 阴极被配置为电连接到第一半导体层,并且第二半导体层被配置为基于收集的光电流来跟踪入射光。 金属层还包括被配置为准直入射光的针孔,并且多个阴极相对于针孔的轴线形成n阶的旋转对称