公开(公告)号：US20250075322A1

公开(公告)日：2025-03-06

申请号：US18822332

申请日：2024-09-02

Applicant: Tokyo Electron Limited

Inventor： Takuya HIGUCHI ,  Kosuke TAKAHASHI ,  Yasuhiro ONODERA

IPC: C23C16/54 ,  C23C16/06

Abstract: A method of monitoring a liquid raw material in a gas supply device, including a raw material storage tank that stores the liquid raw material, a liquid level detector that detects a liquid level of the liquid raw material, a gas inlet provided in the raw material storage tank, a gas outlet provided in the raw material storage tank, and a raw material inlet provided in the raw material storage tank, includes calculating a remaining amount of the liquid raw material based on a usage amount of the raw material and a replenishment amount of the raw material, estimating a detection result of a virtual sensor from the calculated remaining amount of the liquid raw material, and monitoring the liquid raw material based on a detection result of the liquid level detector and the estimated detection result of the virtual sensor.