公开(公告)号：US10029456B2

公开(公告)日：2018-07-24

申请号：US13832570

申请日：2013-03-15

申请人： Toshiba Memory Corporation

发明人： Yasutada Nakagawa ,  Satoshi Tanaka ,  Yoko Takekawa

IPC分类号： B41J2/45 ,  B41J2/045 ,  B29C43/02 ,  G03F7/00 ,  B82Y40/00 ,  B82Y10/00

摘要： In general, according to one embodiment, a method is disclosed for a droplet positioning method.The method can include determining an amount of the droplet required in each of a first region, determining a total amount of the droplet, determining a total number of the droplets, determining a provisional positioning of the droplets based on a template contact form, redividing the face for forming the base body pattern again using the second regions, and determining an evaluation value for each second region. If the distribution of the evaluation values is out of the target range, a repositioning at least any of the droplets, redividing the face for forming the base body pattern again using the second regions, and determining an evaluation value for each second region are repeated until distribution of the evaluation values is in the target range.