公开(公告)号：US20030155821A1

公开(公告)日：2003-08-21

申请号：US10382819

申请日：2003-03-06

Applicant: U.S. PHILIPS CORPORATION

Inventor： Petrus C.M. Frissen ,  Johan C. Compter ,  Antonius T.A. Peijnenburg ,  Erik R. Loopstra

IPC: H02K041/00

CPC classification number: G03F7/70758 ,  H02K41/031 ,  H02K2201/18 ,  Y10S414/135

Abstract: A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90null counterclockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of null45null, and the other type having an offset of null45null with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

Abstract translation: 一种定位装置，包括可在X方向和Y方向上相对于第二部分（2）移动的第一部分（1），所述第一部分（1）包括载体（5），磁体系统 （3）分别根据与X方向和Y方向平行延伸的行（7）和列（8）的图案排列。 每行和列中的磁体根据Halbach阵列布置，即每行（7）中的连续磁体的磁性取向和每列（8）逆时针旋转90°。 第二部分（2）包括具有两种类型的电线圈（C1，C2）的电线圈系统（4），一种具有+45°的角度偏移的类型，另一种类型具有-45°的偏移，相对于 到X方向。 磁体配置导致非常强的磁场。