公开(公告)号：US20250113605A1

公开(公告)日：2025-04-03

申请号：US18496941

申请日：2023-10-30

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wan-Tien Chou ,  Gang Ren ,  Xingxing Chen ,  Ji Feng ,  Guohai Zhang

IPC: H01L21/84 ,  H01L21/8234 ,  H01L27/12

Abstract: A method for fabricating a radio-frequency (RF) device includes the steps of first providing a substrate comprising a core region and a non-core region, forming a shallow trench isolation (STI) in the substrate between the core region and the non-core region, forming a first gate oxide layer on the core region and the non-core region, forming a patterned mask on the non-core region and the STI, removing the first gate oxide layer on the core region, and then forming a second gate oxide layer on the core region.