公开(公告)号：US20250149359A1

公开(公告)日：2025-05-08

申请号：US18395777

申请日：2023-12-26

Applicant: United Microelectronics Corp.

Inventor： Chih-Chung KUO ,  Yung-Chieh KUO ,  Cheng-Tai PENG ,  Min-Wei TSAI ,  Sheng- Ming WANG ,  Jui-Hung LEE ,  Ke-Wei WEI ,  Ping-Yi LU ,  Shi-Hao WANG ,  Chih-Hsiang HSIAO

IPC: H01L21/67

Abstract: A controlling method for semiconductor process auxiliary apparatus, a control assembly and a manufacturing system are provided. The controlling method includes the following steps. At least one manufacturing parameter of a semiconductor manufacturing processing apparatus are obtained. An energy adjusting signal is generated according to the manufacturing parameter. An auxiliary apparatus controlling signal is generated according to the energy adjusting signal. The semiconductor process auxiliary apparatus is controlled according to the semiconductor auxiliary apparatus controlling signal.