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公开(公告)号：US20240103383A1
公开(公告)日：2024-03-28
申请号：US17961575
申请日：2022-10-07
Applicant: United Microelectronics Corp.
Inventor： Hui Liu
IPC: G03F7/20 , H01L23/544
CPC classification number: G03F7/70633 , H01L23/544 , H01L2223/54426
Abstract: An overlay target includes a plurality of working zones, a plurality of holes in each of the working zones, and a first layer filling in the plurality of holes. The plurality of holes are not filled up by the first layer, and a plurality of spaces are reserved in the plurality of holes.
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