公开(公告)号：US08962383B2

公开(公告)日：2015-02-24

申请号：US14246737

申请日：2014-04-07

Applicant: Universal Display Corporation

Inventor： Siddarth Harikrishna Mohan ,  Paul E. Burrows

IPC: H01L51/40 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0003 ,  C23C14/04 ,  C23C14/12 ,  C23C14/228 ,  H01L51/0005 ,  H01L51/56

Abstract: Systems and methods are provided for depositing thin patterned films of materials in which individual elements of the patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on a substrate in a plurality of laterally spaced elements.

Abstract translation: 提供了用于沉积材料的薄图案化膜的系统和方法，其中通过具有不同几何形状的两个或更多个喷嘴沉积图案化膜的各个元件。 不同的喷嘴几何形状可以包括一个或多个不同的节流直径，不同的排气直径，不同的横截面形状，不同的孔角度，不同的壁角度，与基板的不同排气距离以及相对于运动方向的不同前缘 喷嘴或基板。 方法可以包括从多个喷嘴喷射载气和材料并将材料沉积在多个横向间隔的元件的基板上的步骤。