Wafer carrier with a multi-pocket configuration
    1.
    外观设计
    Wafer carrier with a multi-pocket configuration 有权
    具有多口袋配置的晶圆载体

    公开(公告)号:USD778247S1

    公开(公告)日:2017-02-07

    申请号:US29524104

    申请日:2015-04-16

    摘要: A wafer carrier including thirty-five pockets arranged on a top surface, configured to be used with a chemical vapor deposition device, is provided. The wafer carrier comprises: a body having a top surface and a bottom surface arranged opposite one another, and a plurality of pockets defined in the top surface of the wafer carrier, wherein the plurality of pockets consist of a total of thirty-five pockets, each of the pockets is arranged along one of three circles, and the three circles are concentric with one another and with a circular outline formed by a perimeter of the top surface.

    摘要翻译: 提供了一种晶片载体,其包括配置成与化学气相沉积装置一起使用的顶表面上的三十五个凹穴。 晶片载体包括:主体,其具有彼此相对布置的顶表面和底表面,以及限定在晶片载体的顶表面中的多个凹穴,其中多个凹穴由总共三十五个凹穴组成, 每个凹穴沿着三个圆圈中的一个布置,并且三个圆圈彼此同心并具有由顶部表面的周边形成的圆形轮廓。