公开(公告)号：US20180173018A1

公开(公告)日：2018-06-21

申请号：US15671982

申请日：2017-08-08

Applicant: WUHAN RESEARCH INSTITUTE OF POSTS AND TELECOMMUNICATIONS

Inventor： MIAOFENG LI ,  XI XIAO ,  LEI WANG ,  DAIGAO CHEN ,  QI YANG ,  SHAOHUA YU

IPC: G02F1/01

CPC classification number: G02F1/011 ,  G02F2201/122 ,  G02F2201/127

Abstract: The present invention discloses a GSG track-type radio-frequency electrode, a silicon-based traveling-wave electrode light modulator, and a preparation method, and relates to the field of high-speed electro-optical chips. The GSG track-type radio-frequency electrode includes a GSG-type planar electrode, where a track electrode used for delaying an electric field is periodically added to one side or dual sides of the GSG-type planar electrode, and the track electrode is connected to a ground electrode of the GSG-type planar electrode. The silicon-based traveling-wave electrode light modulator includes the GSG track-type radio-frequency electrode and a conventional silicon-based traveling-wave electrode light modulator, and the GSG track-type radio-frequency electrode is connected to an active region of the silicon-based traveling-wave electrode light modulator by using through holes between electrode layers. The present invention can improve parameter design freedom of an electrode and realize effective signal parameter matching.