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公开(公告)号：US20100165054A1
公开(公告)日：2010-07-01
申请号：US12344706
申请日：2008-12-29
CPC分类号： B41J2/1412 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49
摘要： A fin-shaped heater stack includes first strata configured to support and form fluid heater elements responsive to repetitive electrical activation and deactivation to produce repetitive cycles of ejection of a fluid, and second strata on the first strata to protect the fluid heater elements from adverse effects of the repetitive cycles of fluid ejection and of contact with the fluid. The first strata include a substrate having a front surface, and heater substrata supported on the front surface. The heater substrata have opposite facing side surfaces which extend approximately perpendicular to the front surface and an end surface interconnecting the side surfaces which extends approximately parallel to the front surface such that the heater substrata is provided in either an upright or inverted fin-shaped configuration on the substrate with the fluid heater elements forming the opposite facing side surfaces of the heat substrata.
摘要翻译： 鳍状加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生流体的重复循环和第一层上的第二层，以保护流体加热器元件免受不利影响 流体喷射和与流体接触的重复循环。 第一层包括具有前表面的基底和支撑在前表面上的加热器基底。 加热器基体具有相对的前表面大致垂直延伸的相对的侧表面，以及使大致平行于前表面延伸的侧表面相互连接的端面，使得加热器基底以直立或倒立的翅片形状设置在 具有流体加热器元件的基底形成加热基底的相对面对的侧表面。
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公开(公告)号：US08366245B2
公开(公告)日：2013-02-05
申请号：US12344706
申请日：2008-12-29
IPC分类号： B41J2/05
CPC分类号： B41J2/1412 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49
摘要： A fin-shaped heater stack includes first strata configured to support and form fluid heater elements responsive to repetitive electrical activation and deactivation to produce repetitive cycles of ejection of a fluid, and second strata on the first strata to protect the fluid heater elements from adverse effects of the repetitive cycles of fluid ejection and of contact with the fluid. The first strata include a substrate having a front surface, and heater substrata supported on the front surface. The heater substrata have opposite facing side surfaces which extend approximately perpendicular to the front surface and an end surface interconnecting the side surfaces which extends approximately parallel to the front surface such that the heater substrata is provided in either an upright or inverted fin-shaped configuration on the substrate with the fluid heater elements forming the opposite facing side surfaces of the heat substrata.
摘要翻译： 鳍状加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生流体的重复循环和第一层上的第二层，以保护流体加热器元件免受不利影响 流体喷射和与流体接触的重复循环。 第一层包括具有前表面的基底和支撑在前表面上的加热器基底。 加热器基体具有相对的前表面大致垂直延伸的相对的侧表面，以及使大致平行于前表面延伸的侧表面相互连接的端面，使得加热器基底以直立或倒立的翅片形状设置在 具有流体加热器元件的基底形成加热基底的相对面对的侧表面。
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3.发明授权Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate 有权平面加热器堆叠和方法，用于在基板上方的平面加热器基底内制造具有空腔的平面加热器堆叠公开(公告)号：US08414786B2
公开(公告)日：2013-04-09
申请号：US12265342
申请日：2008-11-05
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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4.发明申请PLANAR HEATER STACK AND METHOD FOR MAKING PLANAR HEATER STACK WITH CAVITY WITHIN PLANAR HEATER SUBSTRATA ABOVE SUBSTRATE 有权平面加热器堆叠和方法，用于在上述平面加热器底部制造具有空腔的平面加热器堆叠公开(公告)号：US20130076837A1
公开(公告)日：2013-03-28
申请号：US13432209
申请日：2012-03-28
IPC分类号： B41J2/05
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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公开(公告)号：US20110123932A1
公开(公告)日：2011-05-26
申请号：US12622479
申请日：2009-11-20
IPC分类号： G03F7/20 , H01L21/3065 , C23F1/00 , H01L21/308
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1645
摘要： Methods are described for forming a fluid ejection device on a substrate having a first surface and a second surface, the first surface having plurality of electrical heater elements. A sacrificial polymer layer is added over the first surface, a conformal material over the sacrificial polymer layer forms a nozzle layer, the sacrificial polymer is then removed to form ink ejection chambers, the nozzle layer is removed to form nozzle holes, a mask layer is used to form an exposed region and an unexposed region, the exposed region defining a central ink via, which is then etched to form the central ink via.
摘要翻译： 描述了在具有第一表面和第二表面的基底上形成流体喷射装置的方法，第一表面具有多个电加热器元件。 在第一表面上添加牺牲聚合物层，牺牲聚合物层上的共形材料形成喷嘴层，然后除去牺牲聚合物以形成喷墨室，除去喷嘴层以形成喷嘴孔，掩模层为 用于形成曝光区域和未曝光区域，暴露区域限定中心墨水通孔，然后将其中的墨水经过蚀刻以形成中心墨水通孔。
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6.发明申请PLANAR HEATER STACK AND METHOD FOR MAKING PLANAR HEATER STACK WITH CAVITY WITHIN PLANAR HEATER SUBSTRATA ABOVE SUBSTRATE 有权平面加热器堆叠和方法，用于在上述平面加热器底部制造具有空腔的平面加热器堆叠公开(公告)号：US20100111509A1
公开(公告)日：2010-05-06
申请号：US12265342
申请日：2008-11-05
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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公开(公告)号：US20090233386A1
公开(公告)日：2009-09-17
申请号：US12046494
申请日：2008-03-12
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , Y10T29/49401
摘要： A method for forming an ink jetting device includes providing a silicon substrate having a first surface having formed thereon a plurality of electrical heater elements to form a first upper exposed surface; depositing a polymer over the first upper exposed surface to form a sacrificial polymer layer; patterning the sacrificial polymer layer to form a second exposed upper surface; depositing a conformal material over the second exposed upper surface to form a conformal nozzle layer; patterning the conformal nozzle layer to form a plurality of nozzle holes located over the electrical heater elements; patterning a mask layer to form an exposed region of the second surface of the silicon substrate that defines a location of a central ink via; etching the exposed region to form the central ink via; and removing a portion of a remainder of the polymer layer to form ink ejection chambers.
摘要翻译： 一种形成喷墨装置的方法包括：提供具有第一表面的硅衬底，其上形成有多个电加热器元件，以形成第一上暴露表面; 在第一上暴露表面上沉积聚合物以形成牺牲聚合物层; 图案化牺牲聚合物层以形成第二暴露的上表面; 在第二暴露的上表面上沉积保形材料以形成共形喷嘴层; 图案化共形喷嘴层以形成位于电加热器元件上方的多个喷嘴孔; 图案化掩模层以形成限定中心墨水通孔的位置的硅衬底的第二表面的暴露区域; 蚀刻暴露区域以形成中心墨水通孔; 并除去聚合物层的其余部分的一部分以形成喷墨室。
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8.发明授权Heater stack and method for making heater stack with heater element decoupled from substrate 有权加热器堆叠和加热器堆叠的方法，加热器元件与基板分离公开(公告)号：US07841702B2
公开(公告)日：2010-11-30
申请号：US12265092
申请日：2008-11-05
IPC分类号： B41J2/05
CPC分类号： B41J2/14129 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1639
摘要： A heater stack includes first strata configured to support and form a fluid heater element responsive to repetitive electrical activation and deactivation to produce cycles of fluid ejection and second strata overlying the first strata to protect the heater element. A decomposed sacrificial layer of a preselected polymer between the substrate and a heater substrata containing the heater element provides a decoupled relationship between them which, during a heat-up period of each cycle, results in the heater element buckling out of physical contact with substrate enabling the heater element to transfer heat energy for producing fluid ejection into the fluid without transferring any into the substrate whereas the decoupled relationship, during the next following cool-down period of each cycle, results in the heater element de-buckling back into physical contact with the substrate enabling the heater element transfer residual heat energy to the substrate.
摘要翻译： 加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生流体喷射循环，并且覆盖第一层的第二层以保护加热器元件。 在基板和包含加热器元件的加热器基底之间的预选聚合物的分解的牺牲层提供了它们之间的去耦合关系，它们在每个循环的加热时段期间导致加热器元件屈曲于与基板的物理接触，使得能够 加热器元件以传递热能以产生流体喷射到流体中而不将任何物质转移到基板中，而在每个循环的接下来的冷却阶段期间的解耦关系导致加热器元件脱扣回到物理接触 该基板使得加热器元件将剩余的热能传递到基板。
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9.发明申请HEATER STACK AND METHOD FOR MAKING HEATER STACK WITH CAVITY BETWEEN HEATER ELEMENT AND SUBSTRATE 有权加热器堆叠和加热器堆叠与加热器元件和基板之间的空隙的方法公开(公告)号：US20100110146A1
公开(公告)日：2010-05-06
申请号：US12265162
申请日：2008-11-05
IPC分类号： B41J2/05
CPC分类号： B41J2/1639 , B41J2/14129 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645
摘要： A heater stack includes first strata configured to support and form a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata overlying the first strata and contiguous with the ejection chamber to protect the heater element. The first strata includes a substrate with a cavity formed either in or above the substrate, a heater substrata overlying the cavity and substrate, and a decomposed layer of material between the substrate and heater substrata and processed to provide the cavity substantially empty of the layer of material such that the cavity provides a means which, during repetitive electrical activation, enables the heater element to transfer heat energy into the fluid in the ejection chamber for producing ejection of fluid therefrom substantially without transferring heat energy into the substrate.
摘要翻译： 加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生从加热器元件上方的喷射室的液体喷射的重复循环，以及覆盖在第一层上并与喷射室邻接的第二层 以保护加热器元件。 第一层包括具有形成在基底中或上方的空腔的基底，覆盖空腔和基底的加热器基底，以及在基底和加热器基底之间的材料分解层，并且被处理以提供基本上空的层 材料，使得空腔提供了一种装置，其在重复的电激活期间使得加热器元件能够将热能传递到喷射室中的流体中，用于从基本上不将热能传递到基板中而产生从其流出的流体。
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10.发明授权Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate 有权平面加热器堆叠和方法，用于在基板上方的平面加热器基底内制造具有空腔的平面加热器堆叠公开(公告)号：US08888251B2
公开(公告)日：2014-11-18
申请号：US13432209
申请日：2012-03-28
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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