Radiation sensor with an integrated mechanical optical modulator and related manufacturing process

    公开(公告)号:US12066324B2

    公开(公告)日:2024-08-20

    申请号:US17530785

    申请日:2021-11-19

    CPC classification number: G01J1/36 H01L33/465 G01J2001/363

    Abstract: Radiation sensor including a detection assembly and a chopper assembly, which are mechanically coupled to delimit a main cavity; and wherein the chopper assembly includes: a suspended movable structure, which extends in the main cavity; and an actuation structure, which is electrically controllable to cause a change of position of the suspended movable structure. The detection unit includes a detection structure, which faces the main cavity and includes a number of detection devices. The suspended movable structure includes a first shield of conductive material, which shields the detection devices from the radiation, the shielding of the detection devices being a function of the position of the suspended movable structure.

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