公开(公告)号：US20040065843A1

公开(公告)日：2004-04-08

申请号：US10264599

申请日：2002-10-03

Inventor： David Schut ,  Alexander Govyadinov ,  Xioofeng Yang

IPC: H01J003/06 ,  H01J003/14

CPC classification number: H01J3/02 ,  H01J3/022 ,  H01J3/18 ,  H01J29/481 ,  H01J29/62 ,  H01J2237/3175

Abstract: An emitter device including a focusing array with plural focusing columns to focus emissions from one or more emitters onto a target medium. Relative movement between the target medium and the focused emissions allows each focusing column to focus emissions over an area of the target medium encompassing the movement range. In a preferred embodiment, separate emitter, focusing array and target medium substrates are used. The focusing array may be moveable, or in a particularly preferred embodiment, is affixed to the emitter substrate, in which case the target medium substrate is movable or the focusing array includes beam direction control.

Abstract translation: 一种发射器件，其包括具有多个聚焦列的聚焦阵列，以将来自一个或多个发射器的发射聚焦到目标介质上。 目标介质和聚焦放射体之间的相对移动允许每个聚焦列聚焦在包围移动范围的目标介质的区域上。 在优选实施例中，使用单独的发射器，聚焦阵列和靶介质衬底。 聚焦阵列可以是可移动的，或者在特别优选的实施例中，固定到发射器基板，在这种情况下，目标介质基板是可移动的或聚焦阵列包括光束方向控制。