公开(公告)号：US20040222366A1

公开(公告)日：2004-11-11

申请号：US10485699

申请日：2004-02-02

发明人： Rainer Frick

IPC分类号： H01J003/14

CPC分类号： G01S17/936 ,  G01S7/4817 ,  G01S17/36 ,  G01S17/42 ,  G02B26/12

摘要： The invention relates to a device with a detector element for receiving a light beam reflecting on an object, wherein means for detecting the light beam are provided in the detector element. The invention also relates to a method for distance measurement using said receiver device. A device for determining the distance between a vehicle and an obstacle or a vehicle driving ahead is already known as per DE 197 13 826 A1, wherein a pulsed laser beam serving as send signal scans line-by-line a two-dimensional area using a self-rotating polygonal mirror, wherein said polygonal mirror has a plurality of mirror surfaces that are bent at different angles. The pulse beam reflecting on the object is focused on a detector element by optical lenses. Said device known in prior art requires a polygonal mirror that is complicated to produce and a complicated evaluation electronics due to the fact that, inter alia, the scanning impulses for the control of the laser diode have to be synchronized with the angular position of the polygonal mirror. The invention provides for a self-rotating polygonal mirror with a plurality of mirror surfaces that are bent at a given angle against the rotational axis of said polygonal mirror as receiver device so that the reflecting light beam is deflected in said mirror surfaces by means of an optics system and focused on the detector element.

摘要翻译： 本发明涉及具有用于接收在物体上反射的光束的检测器元件的装置，其中在检测器元件中设置有用于检测光束的装置。 本发明还涉及一种使用所述接收机设备进行距离测量的方法。 根据DE 197 13 826 A1，用于确定车辆与障碍物或前方行驶的车辆之间的距离的装置是已知的，其中用作发送信号的脉冲激光束使用一个二维区域逐行扫描二维区域 自转多面镜，其中所述多面镜具有以不同角度弯曲的多个镜面。 在物体上反射的脉冲光束通过光学透镜聚焦在检测器元件上。 现有技术中已知的所述装置需要复制产生的多面镜和复杂的评估电子元件，这是因为特别是用于控制激光二极管的扫描脉冲必须与多边形的角位置同步 镜子。 本发明提供一种具有多个反射镜表面的自旋转多面镜，所述多个反射镜表面相对于作为接收器装置的所述多面镜的旋转轴线以给定角度弯曲，使得反射光束通过 光学系统，并集中在探测器元件上。

公开(公告)号：US20040195495A1

公开(公告)日：2004-10-07

申请号：US10830848

申请日：2004-04-23

发明人： Andrew G. Cartlidge

IPC分类号： H01L027/00 ,  H01J003/14 ,  H01J005/16 ,  H01J040/14

CPC分类号： G02B13/00

摘要： An imaging system and methodology is provided to facilitate optical imaging performance. The system includes a sensor and a lens system, including one or more lenses, configured according to sensor characteristics to facilitate scaling parts of the sensor to an object field of view so as to provide desired resolution of an object being viewed.

公开(公告)号：US20040188630A1

公开(公告)日：2004-09-30

申请号：US10477664

申请日：2004-05-13

发明人： Matthias Brunner ,  Ralf Schmid

IPC分类号： H01J003/14

CPC分类号： H01J37/153 ,  H01J37/147

摘要： A particle beam apparatus and a device for an energy corrected deflection by a predetermined deflection angle of a particle beam coming in along a beam axis are disclosed, whereby the particle beam consists of charged particles with energy values scattered around a predetermined energy value. The device comprises a corrector, whereby the corrector, by means of a first electric field and a superimposed first magnetic field, deflects the charged particles depending on their energies, and whereby the direction of the charged particles with the predetermined energy value is maintained during the passage through the corrector. The device further comprises a deflector applied after the corrector, whereby the deflector, by means of a second electric field or by means of a second magnetic field, deflects the charged particles with the predetermined energy vague by the predetermined deflection angle away from the beam axis, whereby the deflector focuses the charged particles. Further, the device comprises a controller to control the corrector and the deflector.

摘要翻译： 公开了一种粒子束装置和用于通过沿着光束轴线进入的粒子束的预定偏转角的能量校正偏转的装置，由此粒子束由具有以预定能量值散射的能量值的带电粒子组成。 该装置包括校正器，由此校正器借助于第一电场和叠加的第一磁场根据其能量使带电粒子偏转，并且由此在期间保持具有预定能量值的带电粒子的方向 通过校正器。 该装置还包括在校正器之后施加的偏转器，由此偏转器借助于第二电场或借助于第二磁场使预定能量的带电粒子偏转远离光束轴线的预定偏转角 由此偏转器将带电粒子聚焦。 此外，该装置包括用于控制校正器和偏转器的控制器。

公开(公告)号：US20040169147A1

公开(公告)日：2004-09-02

申请号：US10787082

申请日：2004-02-27

申请人： Canon Kabushiki Kaisha ,  Hitachi High-Technologies Corporation

发明人： Haruhito Ono ,  Masatake Akaike ,  Kenji Tamamori ,  Futoshi Hirose ,  Yasushi Koyama ,  Atsunori Terasaki ,  Ken-ichi Nagae ,  Yoshinori Nakayama

IPC分类号： H01J003/14

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/0437

摘要： A deflector which makes multilayered wiring possible and prevents contamination during the manufacture includes an electrode substrate (400) having a plurality of through holes, and an electrode pair made up of first and second electrodes which oppose the side walls of each through hole in order to control the locus of a charged particle beam passing through the through hole, and a wiring substrate (500) having connection wiring pads connected to the electrode pairs of the electrode substrate to individually apply voltages to the electrode pairs. This deflector is formed by bonding the electrode substrate and wiring substrate via the connection wiring pads of the wiring substrate.

摘要翻译： 可以制造多层布线并防止在制造过程中的污染的偏转器包括具有多个通孔的电极基板（400）和由与每个通孔的侧壁相对的第一和第二电极构成的电极对，以便 控制通过通孔的带电粒子束的轨迹;以及布线基板（500），其具有连接到电极基板的电极对的连接布线焊盘，以分别向电极对施加电压。 该偏转器是通过经布线基板的连接布线焊盘接合电极基板和布线基板而形成的。

公开(公告)号：US20040159777A1

公开(公告)日：2004-08-19

申请号：US10675873

申请日：2003-09-29

申请人： Wavefront Research, Inc.

发明人： Thomas W. Stone

IPC分类号： H01J003/14 ,  H01J005/16

CPC分类号： G02B6/4206 ,  G02B6/4246 ,  G02B6/4249 ,  G02B6/43

摘要： An optical interconnect system having a GRIN rod lens, the GRIN rod lens having a first end and a second end, and further having a preselected length, a preselected width and a preselected index of refraction. Means are fixedly secured to the first end of the GRIN rod lens for emitting electromagnetic radiation and means are fixedly secured to said second end of said GRIN rod lens for receiving the emitted electromagnetic radiation. The GRIN rod lens forms an image of the emitting means onto the receiving means and overcomes problems associated with misalignment. Further embodiments of this optical interconnect system are capable of use in even further applications in an environment where alignment problems are at issue.

摘要翻译： 一种具有GRIN棒状透镜的光学互连系统，所述GRIN棒透镜具有第一端和第二端，并且还具有预选长度，预选宽度和预选折射率。 装置固定地固定到用于发射电磁辐射的GRIN棒状透镜的第一端，并且装置固定地固定到所述GRIN棒透镜的所述第二端以接收发射的电磁辐射。 GRIN棒状透镜在接收装置上形成发射装置的图像，并克服与未对准相关的问题。 该光学互连系统的其它实施例能够用于在对准问题出现问题的环境中的甚至更多应用中。

公开(公告)号：US20040155176A1

公开(公告)日：2004-08-12

申请号：US10771789

申请日：2004-02-03

发明人： Daisuke Ito

IPC分类号： H01J003/14 ,  H01J005/16

CPC分类号： G02B13/004 ,  G02B9/34 ,  G02B13/16 ,  G02B13/18 ,  G02B13/22

摘要： A lens system disclosed in the present application comprises: in order from the front to the rear, a first lens element having a meniscus shape whose concave surface is directed rearward and having a negative optical power; an aperture stop; a second lens element whose both lens surfaces have a convex shape; a third lens element whose both lens surfaces have a concave, and a fourth lens element whose rear surface has a convex shape and having a positive optical power. Thus, a lens system which maintains telecentricity and high optical performance despite a simple and small-sized structure is disclosed.

摘要翻译： 在本申请中公开的透镜系统包括：从前到后的顺序，具有弯曲面形状的第一透镜元件，其凹面朝向后方并具有负光焦度; 孔径光阑; 其两个透镜表面具有凸形的第二透镜元件; 其透镜表面具有凹部的第三透镜元件和其后表面具有凸形并具有正光焦度的第四透镜元件。 因此，公开了一种保持远心度和高光学性能的透镜系统，尽管具有简单和小尺寸的结构。

公开(公告)号：US20040119021A1

公开(公告)日：2004-06-24

申请号：US10630349

申请日：2003-07-29

申请人： Ion Diagnostics ,  Multibeam Systems, Inc. ,  Motorola, Inc.

发明人： N. William Parker ,  Alan D. Brodie ,  George Xinsheng Guo ,  Edward M. Yin ,  Michael C. Matter

IPC分类号： H01J003/14

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J37/3177

摘要： A charge particle optical column capable of being used in a high throughput, mutli-column, multi-beam electron beam lithography system is disclosed herein. The column has the following properties: purely electrostatic components; small column footprint (20 mm square); multiple, individually focused charge particle beams; telecentric scanning of all beams simultaneously on a wafer for increased depth of field; and conjugate blanking of the charged particle beams for reduced beam blur. An electron gun is disclosed that uses microfabricated, field emission sources and a microfabricated aperture-deflector assembly. The aperture-deflector assembly acts as a perfect lens in focusing, steering and blanking a multipicity of electron beams through the back focal plane of an immersion lens located at the bottom of the column. Beam blanking can be performed using a gating signal to decrease beam blur during writing on the wafer.

摘要翻译： 本文公开了一种能够在高通量，多列，多光束电子束光刻系统中使用的电荷粒子光学列。 该柱具有以下特性：纯静电成分; 小柱占地面积（20平方米）; 多个单独聚焦的电荷粒子束; 同时在晶圆上同时扫描所有光束以增加景深; 并且用于减少光束模糊的带电粒子束的共轭消隐。 公开了一种电子枪，其使用微制造的场致发射源和微加工的孔径 - 偏转器组件。 孔径偏转器组件用作聚焦，转向和消隐通过位于塔底部的浸没透镜的后焦平面的多个电子束的完美透镜。 可以使用门控信号进行光束消隐，以减少在晶片上写入期间的光束模糊。

公开(公告)号：US20040119003A1

公开(公告)日：2004-06-24

申请号：US10653893

申请日：2003-09-04

发明人： Yoshito Ikeda

IPC分类号： H01J003/14 ,  H01J005/16

CPC分类号： B41J2/473 ,  G06K15/1214 ,  H04N1/053 ,  H04N1/1135 ,  H04N2201/0471 ,  H04N2201/04729 ,  H04N2201/04732 ,  H04N2201/04744

摘要： An image forming apparatus is disclosed that is capable of making it simple to initialize a laser system thereof. The image forming apparatus includes a first photo detector that detects a part of a laser beam from each of the lasers and generates respective power adjustment signals for the lasers, a second photo detector that detects another part of the scanning laser beam of each of the lasers and generates a synchronization signal corresponding to each laser, and a power adjustment control unit that changes, the output power of each of the lasers to a predetermined value. During the adjustment of output powers of the lasers, the power of a laser is monitored by using the synchronization signal. The power adjustment control unit turns on a laser for power adjustment, and turns off the laser when the scanning synchronization signal is detected twice to complete the power adjustment of the laser, and then starts power adjustment of the next laser.

摘要翻译： 公开了能够使初始化其激光系统变得简单的图像形成装置。 图像形成装置包括：第一光电检测器，其检测来自每个激光器的激光束的一部分，并产生用于激光器的相应的功率调节信号;第二光电检测器，其检测每个激光器的扫描激光束的另一部分 并产生对应于每个激光器的同步信号，以及功率调节控制单元，其将每个激光器的输出功率改变为预定值。 在调整激光器的输出功率期间，通过使用同步信号来监视激光器的功率。 功率调节控制单元打开用于功率调节的激光器，并且当检测到扫描同步信号两次以完成激光器的功率调整时关闭激光器，然后开始下一个激光器的功率调节。

公开(公告)号：US20040113059A1

公开(公告)日：2004-06-17

申请号：US10682236

申请日：2003-10-09

申请人： OLYMPUS AMERICA INC.

发明人： Yoshihiro Kawano ,  Kiyoshi Koike

IPC分类号： H01J003/14 ,  H01J005/16

CPC分类号： G02B21/004 ,  G02B21/002 ,  G02B21/0032 ,  G02B21/0048

摘要： A scanning optical microscope including: a light source; a lens for altering the cross-sectional shape aspect ratio of a beam of light emitted from the light source; at least one lens for converging beams of light of different cross-sectional shape aspect ratio to create a linear light; a first light modulation member able to impart shade to the converged linear light; a lens that can form the light to which the shade has been imparted as a parallel light; a scanning member that can alter the angle of illumination; a lens for focusing the light to which the shade has been imparted; an objective lens for projecting the light to which the shading has been imparted to a sample body; and a lens for imaging the reflected light from the sample body or the light generated by the sample body on to a sensor.

摘要翻译： 一种扫描光学显微镜，包括：光源; 用于改变从光源发射的光束的横截面形状纵横比的透镜; 至少一个透镜，用于会聚具有不同横截面形状纵横比的光束以产生线性光; 第一光调制构件，能够对会聚的线状光赋予遮光; 可以形成作为平行光的阴影赋予的光的透镜; 可以改变照明角度的扫描构件; 用于聚焦已经施加阴影的光的透镜; 用于将已经施加了阴影的光投射到样本体的物镜; 以及用于将来自样本体的反射光或由样本体产生的光成像到传感器的透镜。

公开(公告)号：US20040094699A1

公开(公告)日：2004-05-20

申请号：US10639507

申请日：2003-08-13

申请人： ASAHI GLASS COMPANY LIMITED

发明人： Ryuichiro Goto ,  Hiroki Hotaka ,  Yoshiharu Ooi ,  Reiko Nozawa ,  Noriaki Shimodaira ,  Ryota Murakami

IPC分类号： H01J003/14 ,  H01J005/16

CPC分类号： G11B7/1353 ,  G02B5/1866 ,  G02B5/203 ,  G02B27/1006 ,  G02B27/1086 ,  G02B27/144 ,  G02B27/145 ,  G11B7/127 ,  G11B2007/0006

摘要： An optical head device having an optical element capable of transmitting without diffracting light having a wavelength emitted from a two-wavelength semiconductor laser and capable of diffracting light having another wavelength, to provide high utilization efficiency of light in a stable manner. For this purpose, a wavelength-selective diffraction element 1A comprising a transparent substrate having a front surface on which a grating having a periodically recessed and projected shape in cross section is formed and a filling member 13A filled in the concavo-convex portion 12A of the grating wherein the concavo-convex portion of the grating is provided with an organic pigment having the absorption edge of light in a region having a shorter wavelength than the wavelength null1, and the concavo-convex member and the filling member have the same refractive index with respect to either one of light having a wavelength null1 and light having a wavelength null2, and they have different refractive indices with respect to the other light having a wavelength, is disposed between the light source and the objective lens of the optical head device.

摘要翻译： 一种具有光学元件的光学头装置，其能够在不衍射具有从双波长半导体激光器发射的波长的光并且能够衍射具有另一波长的光的情况下传输，从而以稳定的方式提供高的光的利用效率。 为此目的，一种波长选择性衍射元件1A，其包括具有前表面的透明基板，其上形成有横截面为周期性凹凸形状的光栅，填充部件13A填充在凹凸部12A中 光栅，其中光栅的凹凸部分具有在具有比波长λ1更短的波长的区域中具有光的吸收边缘的有机颜料，并且凹凸构件和填充构件具有与波长λ1相同的折射率 相对于具有波长λ1的光和波长λ2的光，并且相对于具有波长的其他光具有不同的折射率设置在光学头与光学头装置的物镜之间。