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公开(公告)号：US10228616B2
公开(公告)日：2019-03-12
申请号：US15300845
申请日：2015-05-15
发明人： Hiroshi Sato
摘要： The present invention provides an imprint apparatus which performs an imprint process of forming a pattern on a substrate by molding an imprint material on the substrate using a mold, the apparatus including a measurement unit configured to measure relative positions of the mold and the substrate, a light source unit configured to emit light for curing the imprint material, a scanning unit configured to scan light from the light source unit on the substrate, and a control unit configured to control the imprint process, wherein the control unit performs the imprint process by causing the scanning unit to scan the light while partially aligning the mold and the substrate with each other based on a measurement result of the measurement unit.
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92.发明申请IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE 有权IMPRINT APPARATUS，AND METHOD OF MANUFACTURING ARTICLE公开(公告)号：US20170043511A1
公开(公告)日：2017-02-16
申请号：US15224911
申请日：2016-08-01
发明人： Hiroshi Sato
CPC分类号： B29C43/58 , B29C43/021 , B29C2043/585 , B29C2043/5891 , G03F7/0002
摘要： The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising an image sensing unit configured to sense an image of the imprint material via the mold, and a control unit configured to, in a state in which the mold and the imprint material are in contact with each other, cause the image sensing unit to sense the image of the imprint material while scanning the image sensing unit and obtain information on forming of the pattern of the imprint material based on the image obtained by the image sensing unit.
摘要翻译： 本发明提供了一种压印装置，其通过使用模具在基板上形成压印材料的图案，该装置包括被配置为经由模具感测压印材料的图像的图像感测单元，以及控制单元， 在模具和压印材料彼此接触的状态下，使得图像感测单元在扫描图像感测单元的同时感测压印材料的图像，并获得关于形成压印材料图案的信息 在由图像感测单元获得的图像上。
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公开(公告)号：US20170023857A1
公开(公告)日：2017-01-26
申请号：US15300845
申请日：2015-05-15
发明人： Hiroshi Sato
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G03F9/7042
摘要： The present invention provides an imprint apparatus which performs an imprint process of forming a pattern on a substrate by molding an imprint material on the substrate using a mold, the apparatus including a measurement unit configured to measure relative positions of the mold and the substrate, a light source unit configured to emit light for curing the imprint material, a scanning unit configured to scan light from the light source unit on the substrate, and a control unit configured to control the imprint process, wherein the control unit performs the imprint process by causing the scanning unit to scan the light while partially aligning the mold and the substrate with each other based on a measurement result of the measurement unit.
摘要翻译： 本发明提供了一种压印装置，其通过使用模具在基板上成型压印材料来进行在基板上形成图案的压印处理，该装置包括：测量单元，其被配置为测量模具和基板的相对位置; 被配置为发光以固化所述压印材料的光源单元，被配置为扫描来自所述基板上的所述光源单元的光的扫描单元和被配置为控制所述压印处理的控制单元，其中，所述控制单元通过引起所述压印处理 所述扫描单元基于所述测量单元的测量结果来扫描所述光，同时使所述模具和所述基板彼此部分对准。
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公开(公告)号：US20160147793A1
公开(公告)日：2016-05-26
申请号：US14947080
申请日：2015-11-20
发明人： Atsuo Nomoto , Hiroshi Sato , Yuji Kaneda , Takashi Suzuki
CPC分类号： G06F17/30256 , G06F17/30601 , G06K9/00228
摘要： An image retrieving apparatus is equipped with: an image obtaining unit for obtaining a plurality of images; a category obtaining unit for obtaining a category to which each of the obtained images belongs; a basic searching unit, for searching a specific image including a specific object, from the obtained images; a counting unit for counting the number of the specific images for each category obtained; a determining unit for determining whether or not an additional search for the specific image is necessary for each category, based on the counted number of the specific images of each category; and an additional searching unit for searching the specific image from among the images which belong to the category for which it has been determined that the additional search is necessary and from which the searched specific image has been excluded.
摘要翻译： 图像检索装置配备有：图像获取单元，用于获得多个图像; 类别获取单元，用于获得所获得的每个图像所属的类别; 基本搜索单元，用于从所获得的图像中搜索包括特定对象的特定图像; 计数单元，用于对获得的每个类别的特定图像的数量进行计数; 确定单元，用于基于每个类别的特定图像的所计数的数量，确定对于每个类别是否需要对特定图像的附加搜索; 以及附加搜索单元，用于从属于已经确定需要附加搜索的类别的图像中搜索特定图像，并且从其中排除搜索到的特定图像。
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公开(公告)号：US20160034782A1
公开(公告)日：2016-02-04
申请号：US14806957
申请日：2015-07-23
发明人： Shunsuke Nakano , Hiroshi Sato , Yuji Kaneda , Takashi Suzuki , Atsuo Nomoto
CPC分类号： G06K9/00288 , G06K9/627
摘要： An image processing apparatus includes: a holding unit that holds a plurality of images; a condition checking unit that checks imaging conditions of the plurality of images; a collation determining unit that determines whether to collate images among the plurality of images based on the imaging conditions of the images; a collation unit that collates the images determined to be collated by the collation determining unit to obtain a degree of similarity; and a classifying unit that classifies the collated images into a same category when the degree of similarity is equal to or greater than a predetermined threshold.
摘要翻译： 一种图像处理装置，包括：保持单元，保持多个图像; 条件检查单元，其检查所述多个图像的成像条件; 对照确定单元，基于图像的成像条件来确定是否整理多个图像中的图像; 对照单元，其将由所述核对确定单元确定的被整理的图像进行对照以获得相似度; 以及分类单元，当相似度等于或大于预定阈值时，将对照图像分类为相同类别。
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96.发明申请POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE 审中-公开位置检测装置，位置检测方法，印刷装置和制造方法公开(公告)号：US20150377614A1
公开(公告)日：2015-12-31
申请号：US14750193
申请日：2015-06-25
发明人： Hiroshi Sato
CPC分类号： G01B11/254 , G03F7/0002 , G03F9/7038 , G03F9/7049
摘要： The present invention provides a position detection apparatus including a detection unit configured to detect moire caused by overlap between a first diffraction grating including patterns arrayed in a first direction and a second diffraction grating including patterns arrayed in the first direction, and a processing unit configured to obtain a relative position of the first diffraction grating and the second diffraction grating based on the moire, wherein a width of an end pattern of patterns included in at least one of the first diffraction grating and the second diffraction grating in the first direction is smaller than widths of remaining patterns of the at least one diffraction grating in the first direction.
摘要翻译： 本发明提供了一种位置检测装置，其包括：检测单元，被配置为检测由包括沿第一方向排列的图案的第一衍射光栅与包括沿第一方向排列的图案的第二衍射光栅之间的重叠引起的莫尔条纹;以及处理单元， 基于莫尔条纹获得第一衍射光栅和第二衍射光栅的相对位置，其中包括在第一方向上的第一衍射光栅和第二衍射光栅中的至少一个中的图案的端部图案的宽度小于 所述至少一个衍射光栅在第一方向上的剩余图案的宽度。
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公开(公告)号：US20150278584A1
公开(公告)日：2015-10-01
申请号：US14666139
申请日：2015-03-23
发明人： Shunsuke Nakano , Hiroshi Sato , Yuji Kaneda , Takashi Suzuki , Atsuo Nomoto
CPC分类号： G06K9/00288 , G06K9/4661
摘要： An object discriminating apparatus is provided with an obtaining unit configured to obtain an input image including an object; an extracting unit configured to extract a feature from the input image; a calculating unit configured to calculate, by collating the feature extracted from the input image and a feature of a previously registered registration image with each other, similarity between the object included in the input image and an object included in the registration image; a deriving unit configured to derive a difference between a variation in the input image and a variation in an output image; a converting unit configured to convert the calculated similarity on the basis of the derived difference between the variations; and a deciding unit configured to decide, on the basis of the converted similarity, whether or not the object included in the input image is identical with the object included in the registration image.
摘要翻译： 物体鉴别装置设置有获取单元，其被配置为获得包括对象的输入图像; 提取单元，被配置为从所述输入图像中提取特征; 计算单元，被配置为通过将从输入图像提取的特征与先前登记的登记图像的特征相互对照来计算包括在输入图像中的对象与包括在登记图像中的对象之间的相似度; 导出单元，被配置为导出输入图像的变化与输出图像的变化之间的差; 转换单元，被配置为基于导出的变化差异来转换所计算的相似度; 以及决定单元，被配置为基于所转换的相似度来确定包括在输入图像中的对象是否与包括在注册图像中的对象相同。
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98.发明申请IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD OF IDENTIFYING OBJECT IN IMAGE 有权图像处理设备和图像处理方法识别图像中的对象公开(公告)号：US20150146991A1
公开(公告)日：2015-05-28
申请号：US14547929
申请日：2014-11-19
发明人： Shunsuke Nakano , Hiroshi Sato , Yuji Kaneda , Takashi Suzuki , Atsuo Nomoto
IPC分类号： G06K9/62
CPC分类号： G06K9/6807 , G06K9/00288
摘要： The degree of similarity between corresponding local feature amounts out of a plurality of local feature amounts of the object in the input image and a plurality of local feature amounts of an object in an image registered in advance is obtained. At least one degree of similarity is selected out of the obtained degrees of similarity based on a capturing condition for the object in the input image and a capturing condition for the object in the registered image, and one degree of similarity is derived from the at least one selected degree of similarity. It is determined based on the one derived degree of similarity whether the object in the input image belongs to the same category as the object in the registered image.
摘要翻译： 获得输入图像中的对象的多个局部特征量中的相应局部特征量与预先登记的图像中的对象的多个局部特征量之间的相似程度。 基于输入图像中的对象的捕获条件和登记图像中的对象的捕获条件，从获得的相似度中选出至少一个相似度，并且从至少一个 一个选择的相似度。 基于一个导出的相似度确定输入图像中的对象是否属于与注册图像中的对象相同的类别。
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