公开(公告)号：US5667588A

公开(公告)日：1997-09-16

申请号：US658275

申请日：1996-06-05

申请人： Eiichi Iino ,  Kiyataka Takano ,  Masanori Kimura ,  Koji Mizuishi ,  Hirotoshi Yamagishi

发明人： Eiichi Iino ,  Kiyataka Takano ,  Masanori Kimura ,  Koji Mizuishi ,  Hirotoshi Yamagishi

IPC分类号： C30B15/00 ,  C30B15/14 ,  C30B29/06 ,  H01L21/208 ,  C30B35/00

CPC分类号： C30B15/00 ,  Y10S117/90 ,  Y10T117/1032 ,  Y10T117/1068 ,  Y10T117/1072

摘要： Arranged is a covering plate which closes and opens an entrance of a valve container between a lower chamber and an upper chamber, the lower chamber containing a crucible and the upper chamber containing a wire to pull a single crystal. The covering plate is contained in a circle-shaped space portion within a wall by closing and opening means. The covering plate closes the entrance so that an isolation valve is protected. Since at the time of opening the entrance the covering plate is contained within the wall without contacting with the wall, the fall of dusts produced by peeling off of a film deposited on the wall can be prevented. Furthermore, the covering plate is contained in a circle-shaped space portion without exposing the front and back surfaces thereof to the air.

摘要翻译： 排列是在下室和上室之间封闭并打开阀容器的入口的盖板，下室容纳坩埚，上室包含用于拉出单晶的电线。 盖板通过关闭和打开装置容纳在壁内的圆形空间部分中。 盖板关闭入口，从而保护隔离阀。 由于在打开入口时，盖板容纳在壁内而不与壁接触，所以可以防止由于通过剥离沉积在壁上的膜而产生的灰尘的掉落。 此外，覆盖板容纳在圆形空间部分中，而不将其前表面和后表面暴露于空气中。