公开(公告)号：US20140024160A1

公开(公告)日：2014-01-23

申请号：US13752051

申请日：2013-01-28

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Ting-Hau Wu ,  Chun-Ren Cheng ,  Shang-Ying Tsai ,  Jiou-Kang Lee ,  Jung-Huei Peng

IPC: B81C1/00

CPC classification number: B81C1/00134 ,  G01P15/125 ,  G01P15/18

Abstract: An integrated circuit structure includes a triple-axis accelerometer, which further includes a proof-mass formed of a semiconductor material; a first spring formed of the semiconductor material and connected to the proof-mass, wherein the first spring is configured to allow the proof-mass to move in a first direction in a plane; and a second spring formed of the semiconductor material and connected to the proof-mass. The second spring is configured to allow the proof-mass to move in a second direction in the plane and perpendicular to the first direction. The triple-axis accelerometer further includes a conductive capacitor plate including a portion directly over, and spaced apart from, the proof-mass, wherein the conductive capacitor plate and the proof-mass form a capacitor; an anchor electrode contacting a semiconductor region; and a transition region connecting the anchor electrode and the conductive capacitor plate, wherein the transition region is slanted.

Abstract translation: 集成电路结构包括三轴加速度计，其还包括由半导体材料形成的校准质量; 由所述半导体材料形成并连接到所述证明块的第一弹簧，其中所述第一弹簧被构造成允许所述证明物质在平面中沿第一方向移动; 以及由半导体材料形成并连接到校验块的第二弹簧。 第二弹簧被构造成允许证明物质在平面中并且垂直于第一方向在第二方向上移动。 三轴加速度计进一步包括导电电容器板，其包括直接在其上并与隔离物隔开的部分，其中导电电容器板和校验块形成电容器; 与半导体区域接触的锚定电极; 以及连接所述锚定电极和所述导电电容器板的过渡区域，其中所述过渡区域是倾斜的。