公开(公告)号：US4651440A

公开(公告)日：1987-03-24

申请号：US664634

申请日：1986-05-16

申请人： Gerald M. Karl

发明人： Gerald M. Karl

IPC分类号： F26B5/08 ,  F26B11/18 ,  F26B21/14 ,  G03F7/16 ,  H01L21/00 ,  F26B11/08

CPC分类号： H01L21/67034 ,  F26B11/18 ,  F26B21/14 ,  F26B5/08 ,  G03F7/168

摘要： A spin drying apparatus for drying semiconductor wafers wherein the wafers are contacted only at the edge thereof by a plurality of radially extending arms and wherein means is provided for preventing the generation of turbulent air flow by the fan-like effect of the rotation of the arms during the spin drying step and the recontamination of already cleaned and dried wafer surfaces by contaminants stirred up by the operation of the spin drying apparatus itself.

摘要翻译： 一种用于干燥半导体晶片的旋转干燥设备，其中晶片仅在其边缘处通过多个径向延伸的臂接触，并且其中提供了用于防止通过臂的旋转的扇形效应产生湍流空气流动的装置 在旋转干燥步骤期间，以及通过旋转干燥设备本身的操作使污染物搅动已经清洁和干燥的晶片表面的再污染。

公开(公告)号：US4637146A

公开(公告)日：1987-01-20

申请号：US640643

申请日：1984-08-14

申请人： Yasunari Motoki ,  Yuji Ohkuma

发明人： Yasunari Motoki ,  Yuji Ohkuma

IPC分类号： F26B5/08 ,  F26B7/00 ,  F26B11/08 ,  G03F7/40 ,  H01L21/304 ,  F26B11/18

CPC分类号： F26B5/08 ,  F26B7/00 ,  G03F7/40

摘要： A spin dryer including a rotary stage for supporting a substrate to be dried, particularly adapted for use in producing semiconductor devices, and a stationary cover spaced from the substrate. The stationary cover has at least the same area as that of the substrate and is provided with a number of openings for charging a dry and dust-free gas onto the substrate, whereby oxidation and dust-contamination of the substrate are avoided.

摘要翻译： 一种旋转干燥机，包括用于支撑要干燥的基底的旋转台，特别适用于制造半导体器件，以及与基底间隔开的固定盖。 固定盖至少具有与基板相同的面积，并且设置有用于将干燥且无尘的气体加载到基板上的多个开口，从而避免了基板的氧化和灰尘污染。

公开(公告)号：US4608764A

公开(公告)日：1986-09-02

申请号：US735264

申请日：1985-05-17

申请人： Hans Leuenberger

发明人： Hans Leuenberger

IPC分类号： F26B3/06 ,  F26B3/08 ,  F26B5/06 ,  F26B11/14 ,  F26B11/18 ,  F26B17/10 ,  F26B13/30

CPC分类号： F26B11/181 ,  F26B11/14 ,  F26B3/08 ,  F26B5/06

摘要： The particles of the particulate material to be dried are cooled before the drying operation proper, or in the initial phase thereof, to a temperature low enough to make the liquid to be extracted solidify. At least the drying operation proper is carried out in a space bounded by a container, in which a gas, more particularly air, is passed through the particles. While in said space, the particles are subjected to motion, for example, they are whirled by the gas to form a whirling layer. The temperature of the gas is adjusted to have at least a considerable part of the drying operation take place by sublimation, the heat energy required for the sublimiation being supplied to the particles at least in part by the gas passed through them. In this way, the particulate material may be dried with care and nevertheless in relatively large batches, and with limited time expenditure.

摘要翻译： 要干燥的颗粒材料的颗粒在干燥操作适当之前或其初始阶段被冷却到足够低的温度以使待提取的液体固化。 至少干燥操作适用于由容器限定的空间中，其中气体，更特别是空气通过该颗粒。 在所述空间中，颗粒受到运动，例如，它们被气体旋转以形成旋转层。 气体的温度被调节为至少相当大一部分通过升华进行干燥操作，升华所需的热能至少部分地由通过它们的气体提供给颗粒。 以这种方式，颗粒材料可以小心地干燥，然而以相对较大的批次和有限的时间花费来干燥。

公开(公告)号：US4489501A

公开(公告)日：1984-12-25

申请号：US423153

申请日：1982-09-24

申请人： Seiichiro Aigo

发明人： Seiichiro Aigo

IPC分类号： F26B5/08 ,  G03F7/16 ,  H01L21/304 ,  F26B11/18

CPC分类号： G03F7/162 ,  F26B5/08

摘要： Disclosed herein is a spin drier for silicon wafers and the like including a rotor equipped with at least one holder for a carrier, which is adapted to enclose a silicon wafer or the like therein, and a casing embracing the rotor. The radial distance between the circumferential wall of the casing and the central axis of the rotor gradually increases as the circumferential wall extends all around the rotor in its circumferential direction from a position adjacent to an air exhaust port to the air exhaust port, thereby making an air conduit formed around the rotor gradually wider. The bottom wall of the casing gradually slopes down towards the air exhaust port. Owing to the above construction, the resistance to an air stream through the casing has been reduced, thereby preventing air from flowing back into the rotor after striking the circumferential wall of the casing and thus preventing stains and water on the circumferential wall of the casing from flowing back and sticking on wafers or the like.

摘要翻译： 本文公开了一种用于硅晶片等的旋转干燥器，其包括配备有至少一个用于载体的保持器的转子，其适于在其中包围硅晶片等，以及包围该转子的壳体。 随着圆周壁围绕转子的圆周方向从邻近排气口的位置延伸到排气口，壳体的圆周壁与转子的中心轴之间的径向距离逐渐增加，从而使 围绕转子形成的空气管道逐渐变宽。 外壳的底壁逐渐向排气口倾斜。 由于上述结构，通过壳体的空气流的阻力已经降低，从而防止空气在撞击壳体的周壁之后流回到转子中，从而防止壳体的周壁上的污渍和水从 流回并贴在晶片等上。

公开(公告)号：US4445281A

公开(公告)日：1984-05-01

申请号：US339521

申请日：1981-12-18

申请人： Seiichiro Aigoo

发明人： Seiichiro Aigoo

IPC分类号： F26B5/08 ,  F26B7/00 ,  F26B11/18

CPC分类号： F26B7/00 ,  F26B5/08

摘要： A dehydrating drier is so arranged that the dehydrated and dried members in a thin form, such as silicon wafers, glass for liquid crystal, photo masking glass or lenses, are rotated with a rotor, and deflectors are disposed in a ventilation channel for a flow of drying gas which reaches the dehydrated and dried members. Preferably, the deflectors are disposed substantially concentrically to the ventilation channel. Furthermore, the improved dehydrating drier also includes an electricity remover for removing charged electricity on the members. In addition, high voltage electrodes of the electricity remover of an electric type are preferably disposed substantially concentrically to the ventilation channel upstream in the path of the flow of drying gas before reaching the members. In this manner, a dehydrating drier is provided such that with a simplified structure, drying gas uniformly hits all the members so as to achieve a uniformly dried condition, and a reduction in yield of the products or a deterioration in quality due to generation of static electricity is completely prevented.

摘要翻译： PCT No.PCT / JP81 / 00094 Sec。 371日期：1981年12月18日 102（e）1981年12月18日PCT日期1981年4月21日。脱水干燥器被布置成使得诸如硅晶片的脱水和干燥的构件，液晶玻璃，光掩模玻璃或透镜 用转子旋转，并且偏转器设置在通风通道中，用于到达脱水和干燥的构件的干燥气体流。 优选地，偏转器基本上与通风通道同心地设置。 此外，改进的脱水干燥器还包括用于去除构件上的带电的除电器。 此外，电动除电器的高电压电极优选在到达构件之前基本同心地设置在干燥气体流动路径上游的通风通道。 以这种方式，提供一种脱水干燥器，以简化的结构，使干燥气体均匀地打到所有的部件上，从而达到均匀的干燥状态，并且产品的产量降低或由于静电产生而导致的质量下降 完全防止电力。

公开(公告)号：US4287672A

公开(公告)日：1981-09-08

申请号：US64988

申请日：1979-08-09

申请人： Hans Henig

发明人： Hans Henig

IPC分类号： C25D17/20 ,  F26B11/18 ,  F26B3/04

CPC分类号： C25D17/20 ,  F26B11/182

摘要： A method and apparatus for drying pieces in bulk, such as metal screws being electrolytically galvanized. The pieces are charged in a rotating perforated barrel through which drying air is passed. The barrel is positioned in a drying chamber which also contains a ventilator for circulating the air, an air heater and a dehumidifier. These components are arranged so that dry air is drawn through the barrel and the charge by vacuum from the portion of the barrel not filled by the charge. Flexible seals between the barrel outer casing and a suction box direct the flow of air substantially completely through the charge.

摘要翻译： 用于干燥块体的方法和装置，例如电解镀锌的金属螺钉。 将这些件装入穿过干燥空气的旋转穿孔筒中。 桶被定位在干燥室中，该干燥室还包含用于使空气循环的通风机，空气加热器和除湿器。 这些部件被布置成使得干燥的空气通过真空从筒体部分被抽出并且没有充满电荷的部分。 枪管外壳和吸气箱之间的柔性密封将空气的流动基本上完全通过电荷。

公开(公告)号：US3827159A

公开(公告)日：1974-08-06

申请号：US33580673

申请日：1973-02-26

申请人： VENANZETTI VIBRAZIONI

发明人： VENANZETTI M

IPC分类号： B07B1/12 ,  B07B1/28 ,  B65G27/00 ,  C21B7/18 ,  F26B11/18

CPC分类号： C21B7/18 ,  B07B1/12 ,  B07B1/28 ,  B65G27/00 ,  B65G2812/0388

摘要： A conveyor device which is particularly suitable for conveying hot particulate material such as agglomerate for feeding blast furnaces is disclosed. The conveyor is formed with a construction using only bolted connections which nevertheless permits all the necessary degrees of freedom for thermal expansion and contraction without being subject to excessive stresses which might cause fractures. The conveyor comprises a shaker frame having a trough in which the bottom is formed of a plurality of plates in a stepwise array, one end of the shaker frame being higher than the other. The transverse edge of each plate is secured to a respective supporting cross piece and the opposite edge is carried by at least one cranked bracket mounted on the next lower cross piece to which one edge of the adjacent plate is mounted. This arrangement forms a number of openings in the bottom of the trough, and through these openings air can be passed from below to cool the material being conveyed and the plates of the conveyor.

摘要翻译： 公开了一种特别适用于输送热颗粒材料如输送高炉的附聚物的输送装置。 输送机形成仅使用螺栓连接的结构，然而仍然允许热膨胀和收缩的所有必要自由度，而不会受到可能导致断裂的过大应力。 输送机包括具有槽的振动器框架，其中底部由逐步阵列的多个板形成，振动器框架的一端高于另一个。 每个板的横向边缘被固定到相应的支撑横梁上，并且相对边缘由安装在相邻板的一个边缘安装的下一个下横截面上的至少一个曲柄支架承载。 这种布置在槽的底部形成多个开口，并且通过这些开口，空气可以从下方通过以冷却被输送的材料和输送机的板。

公开(公告)号：US3768173A

公开(公告)日：1973-10-30

申请号：US3768173D

申请日：1972-07-17

申请人： OXY METAL FINISHING CORP

发明人： JESSUP R ,  SULFARO A

IPC分类号： F26B17/30 ,  B01J19/00 ,  C25D17/00 ,  F26B11/18 ,  F26B15/14 ,  F26B25/06

CPC分类号： F26B15/143 ,  F26B11/182

摘要： An apparatus for drying workpieces in bulk while disposed within an elongated foraminous treating barrel formed with an opening extending longitudinally of the ends thereof. The apparatus includes a framework which defines an upwardly open threedimensional chamber into which the treating barrel is adapted to be lowered and in which it is oscillated such that the opening therein is alternatively aligned with a pair of discharge ports located in opposed sides of the chamber through which heated air is discharged against the periphery of the barrel and through the opening against the workpieces therein. An exhaust port is provided in the lower region of the chamber for continuously withdrawing moisture-laden air from the chamber and from the interior of the barrel which is recirculated in admixture with make-up air by means of a blower through a heat exchanger and thereafter is discharged through the discharge ports in the chamber.

摘要翻译： 一种本体干燥工件的装置，同时设置在细长的有孔处理筒中，该筒形成有沿其端部纵向延伸的开口。 该装置包括框架，该框架限定向上开口的三维室，处理筒适于降低并且其中摆动，使得其中的开口交替地与位于 加热的空气通过该室通过筒体的周边排出并且通过开口抵靠其中的工件。 排气口设置在室的下部区域中，用于连续地从室中抽出含水分的空气，并从筒的内部通过鼓风机通过热交换器再次与补充空气一起再循环，此后 通过室中的排出口排出。

公开(公告)号：US3733708A

公开(公告)日：1973-05-22

申请号：US3733708D

申请日：1971-03-15

申请人： GOODMAN C

发明人： GOODMAN C

IPC分类号： G06G1/00 ,  F26B11/18 ,  G01B5/00

CPC分类号： G06G1/0052

摘要： A time, speed and distance computer apparatus having a prong fixed to a surface having indicia thereon and a second prong rotatably connected to the surface so that it can pass over the indicia. The two prongs can be placed on two points on the surface of a map for instantaneous determination of the time required to travel between the two points at predetermined speeds. The apparatus may also have a compass associated therewith for use in orienting the surface of the map, or the like.

摘要翻译： 具有固定在其上具有标记的表面的插脚的时间，速度和距离的计算机设备和可旋转地连接到该表面的第二插脚，使得其可以越过标记。 两个插脚可以放置在地图表面上的两个点上，用于瞬时确定以预定速度在两个点之间行进所需的时间。 该装置还可以具有与其相关联的罗盘，以用于定向地图的表面等。

公开(公告)号：US3228117A

公开(公告)日：1966-01-11

申请号：US13931061

申请日：1961-09-19

申请人： SVENSKA FLAEKTFABRIKEN AB

发明人： FOLKE MAGNUSSON

IPC分类号： D06F58/02 ,  F26B11/18

CPC分类号： D06F58/02 ,  F26B11/182