Capacitive micromachined ultrasonic transducers with improved capacitive response
    11.
    发明授权
    Capacitive micromachined ultrasonic transducers with improved capacitive response 失效
    具有改善电容响应的电容式微加工超声换能器

    公开(公告)号:US06328697B1

    公开(公告)日:2001-12-11

    申请号:US09698232

    申请日:2000-10-27

    IPC分类号: A61B800

    摘要: An ultrasonic transducer is formed by a plurality of cMUT cells, each has a charged diaphragm plate capacitively opposing an oppositely charged base plate. The diaphragm plate is distended toward the base plate by a bias charge. The base plate includes a central portion elevated toward the center of the diaphragm plate to cause the charge of the cell to be of maximum density at the moving center of the diaphragm plate.

    摘要翻译: 超声波换能器由多个cMUT电池形成,每个cMUT电池具有电容性地与相对带电的基板相对的带电隔膜板。 隔膜板通过偏置电荷朝向底板扩张。 基板包括朝向隔膜板的中心升高的中心部分,以在隔膜板的移动中心处使电池的电荷达到最大密度。

    Bias charge regulator for capacitive micromachined ultrasonic transducers
    12.
    发明授权
    Bias charge regulator for capacitive micromachined ultrasonic transducers 有权
    用于电容微加工超声波换能器的偏置电荷调节器

    公开(公告)号:US06328696B1

    公开(公告)日:2001-12-11

    申请号:US09697995

    申请日:2000-10-27

    IPC分类号: A61B800

    摘要: An ultrasonic transducer is formed by a plurality of cMUT cells, each comprising a charged diaphragm plate capacitively opposing an oppositely charged base plate. A feedback controlled bias charge regulator controls the bias charge of the capacitive plates. The cMUT cells can be fabricated by conventional semiconductor processes and hence integrated with ancillary transducer circuitry such as the bias charge regulator.

    摘要翻译: 超声波换能器由多个cMUT单元形成,每个cMUT单元包括电容性地与相对带电的基板相对的带电隔膜板。 反馈控制的偏置电荷调节器控制电容板的偏置电荷。 cMUT单元可以通过常规的半导体工艺制造,因此与诸如偏置电荷调节器的辅助换能器电路集成。

    Ultrasonic teeth cleaning appliance having spatial, temporal and/or frequency variations
    15.
    发明授权
    Ultrasonic teeth cleaning appliance having spatial, temporal and/or frequency variations 有权
    具有空间,时间和/或频率变化的超声牙清洁器具

    公开(公告)号:US08769753B2

    公开(公告)日:2014-07-08

    申请号:US13141551

    申请日:2009-12-09

    IPC分类号: A61C17/20

    CPC分类号: A61C17/20

    摘要: The appliance includes an appliance body (12) as well as a system for producing microbubbles (20) and a system for producing an ultrasound signal beam (22) in a frequency range which activates at least some of the microbubbles. The appliance includes at least one of the following: (a) an array of ultrasound transducer elements (40) which produce a plurality of ultrasound signal beams; (b) an amplitude modulation assembly (51) for modulating the amplitude of the ultrasound signal; and (c) a frequency modulation system (61) for changing the frequency of the ultrasound signals over a selected range, to impact a range of microbubble sizes.

    摘要翻译: 该器具包括器具主体(12)以及用于产生微泡(20)的系统和用于在激活至少一些微泡的频率范围内产生超声波信号光束(22)的系统。 该器具包括以下中的至少一个:(a)产生多个超声信号波束的超声换能器元件阵列(40); (b)用于调制超声波信号的振幅的调幅组件(51); 以及(c)用于在选定范围内改变超声波信号的频率的频率调制系统(61),以影响微泡尺寸的范围。

    COLLAPSED MODE OPERABLE CMUT INCLUDING CONTOURED SUBSTRATE
    16.
    发明申请
    COLLAPSED MODE OPERABLE CMUT INCLUDING CONTOURED SUBSTRATE 有权
    收缩模式可操作,包括嵌入式基板

    公开(公告)号:US20110040189A1

    公开(公告)日:2011-02-17

    申请号:US12747249

    申请日:2008-12-12

    IPC分类号: A61B8/14

    CPC分类号: B06B1/0292

    摘要: A capacitive ultrasound transducer capable of operation in collapsed mode either with a reduced bias voltage, or with no bias voltage, is provided. The transducer includes a substrate that is contoured so that a middle region of the flexible membrane is collapsed against the substrate in the absence of a bias voltage. A non-collapsible gap may exists between the substrate and peripheral regions of the flexible membrane. The contour of the substrate may be such as to strain the flexible membrane past the point of collapse, or to mechanically interfere with the flexible membrane. The substrate may include a further membrane disposed beneath the flexible membrane, the further membrane being contoured so that the flexible membrane is collapsed against it. The substrate may a support disposed beneath the further membrane to deflect a corresponding portion of the further membrane upward toward the flexible membrane. The support may be a post. The transducer may be operated in collapse mode with an improved efficiency (k2eff) as compared to otherwise similar conventional transducers exhibiting comparably uncontoured substrates. A related medical imaging system is provided, which may include an array of such transducers disposed on a common substrate. A method of operating such a transducer is provided that includes operating the transducer in the collapse mode in the absence of a bias voltage.

    摘要翻译: 提供能够以折叠模式操作或者具有降低的偏置电压或没有偏置电压的电容式超声换能器。 换能器包括基底,该基底的轮廓使得柔性膜的中间区域在没有偏置电压的情况下相对于基底折叠。 在柔性膜的基底和周边区域之间可能存在不可收缩的间隙。 衬底的轮廓可以是使柔性膜经过塌陷点,或机械地干涉柔性膜。 衬底可以包括设置在柔性膜下方的另一膜,另外的膜被成形为使得柔性膜相对于其折叠。 衬底可以是设置在另外的膜下方的支撑件,以将另外的膜的相应部分向上朝向柔性膜偏转。 支持可能是一个帖子。 传感器可以在崩溃模式下操作,其效率(k2eff)与其他相似的传统换能器相比表现出相当的未结合的基板。 提供了一种相关的医学成像系统,其可以包括设置在公共基底上的这种换能器的阵列。 提供了一种操作这种换能器的方法,其包括在没有偏置电压的情况下以折叠模式操作换能器。

    Fabrication of capacitive micromachined ultrasonic transducers by micro-stereolithography
    17.
    发明授权
    Fabrication of capacitive micromachined ultrasonic transducers by micro-stereolithography 失效
    通过微立体光刻技术制造电容微机械超声换能器

    公开(公告)号:US06632178B1

    公开(公告)日:2003-10-14

    申请号:US09702907

    申请日:2000-10-27

    IPC分类号: A01B800

    摘要: An ultrasonic transducer is formed by a plurality of cMUT cells, each comprising a charged diaphragm plate capacitively opposing an oppositely charged base plate. The cMUT cells can be fabricated by conventional semiconductor processes and hence integrated with ancillary transducer circuitry such as a bias charge regulator. The cMUT cells can also be fabricated by micro-stereolithography whereby the cells can be formed using a variety of polymers and other materials.

    摘要翻译: 超声波换能器由多个cMUT单元形成,每个cMUT单元包括电容性地与相对带电的基板相对的带电隔膜板。 cMUT电池可以通过常规半导体工艺制造,因此与诸如偏置电荷调节器的辅助换能器电路集成。 cMUT细胞也可以通过微立体光刻法制备,从而可以使用各种聚合物和其他材料形成细胞。

    Capacitive micromachined ultrasonic transducers
    18.
    发明授权
    Capacitive micromachined ultrasonic transducers 失效
    电容式微加工超声波换能器

    公开(公告)号:US06443901B1

    公开(公告)日:2002-09-03

    申请号:US09596759

    申请日:2000-06-15

    IPC分类号: A61B0800

    摘要: An ultrasonic transducer is formed by a plurality of cMUT cells, each comprising a charged diaphragm plate capacitively opposing an oppositely charged base plate. The diaphragm plate is distended toward the base plate by a bias charge. The base plate includes a central portion elevated toward the center of the diaphragm plate to cause the charge of the cell to be of maximum density at the moving center of the diaphragm plate. For harmonic operation the drive pulses applied to the cells are predistorted in consideration of the nonlinear operation of the device to reduce contamination of the transmit signal at the harmonic band. The cMUT cells can be fabricated by conventional semiconductor processes and hence integrated with ancillary transducer circuitry such as a bias charge regulator. The cMUT cells can also be fabricated by micro-stereolithography whereby the cells can be formed using a variety of polymers and other materials.

    摘要翻译: 超声波换能器由多个cMUT单元形成,每个cMUT单元包括电容性地与相对带电的基板相对的带电隔膜板。 隔膜板通过偏置电荷朝向底板扩张。 基板包括朝向隔膜板的中心升高的中心部分,以在隔膜板的移动中心处使电池的电荷达到最大密度。 对于谐波操作,考虑到器件的非线性操作来减小施加到单元的驱动脉冲,以减少谐波频带处的发射信号的污染。 cMUT电池可以通过常规半导体工艺制造,因此与诸如偏置电荷调节器的辅助换能器电路集成。 也可以通过微立体光刻法制造cMUT电池,由此可以使用各种聚合物和其它材料形成电池。

    Hex packed two dimensional ultrasonic transducer arrays

    公开(公告)号:US06384516B1

    公开(公告)日:2002-05-07

    申请号:US09488583

    申请日:2000-01-21

    IPC分类号: H04R1700

    CPC分类号: B06B1/0622

    摘要: A two dimensional ultrasonic transducer array suitable for three dimensional phased array scanning is formed of hexagonally close packed transducer elements. In a preferred embodiment the transducer elements have a rectilinear shape, allowing the array to be fabricated with conventional dicing saw processes.