公开(公告)号：US20060141376A1

公开(公告)日：2006-06-29

申请号：US11314638

申请日：2005-12-20

申请人： Ady Levy ,  Michael Hanna ,  Dan Wack ,  John Fielden ,  Christopher Bevis ,  Larry Wagner

发明人： Ady Levy ,  Michael Hanna ,  Dan Wack ,  John Fielden ,  Christopher Bevis ,  Larry Wagner

IPC分类号： G06F17/50 ,  H01L21/66 ,  G03C5/00 ,  G01C25/00

CPC分类号： G03F7/70675 ,  G03F7/38 ,  G03F7/40 ,  G03F7/70425 ,  G03F7/70625

摘要： Methods and systems for controlling variation in dimensions of patterned features across a wafer are provided. One method includes measuring a characteristic of a latent image formed in a resist at more than one location across a wafer during a lithography process. The method also includes altering a parameter of the lithography process in response to the characteristic to reduce variation in dimensions of patterned features formed across the wafer by the lithography process. Altering the parameter compensates for non-time varying spatial variation in a temperature to which the wafer is exposed during a post exposure bake step of the lithography process and an additional variation in the post exposure bake step.

摘要翻译： 提供了用于控制跨晶片的图案化特征的尺寸变化的方法和系统。 一种方法包括在光刻过程期间测量跨越晶片的多于一个位置处的抗蚀剂中形成的潜像的特性。 该方法还包括响应于特性来改变光刻工艺的参数，以减小通过光刻工艺在晶片上形成的图案化特征的尺寸变化。 改变参数补偿在光刻工艺的后曝光烘烤步骤期间晶片曝光的温度中的非时间变化的空间变化以及后曝光烘烤步骤的附加变化。

公开(公告)号：US5761292A

公开(公告)日：1998-06-02

申请号：US912947

申请日：1997-08-14

申请人： Larry Wagner ,  Ralph S. Smith ,  Daniel R. Cox

发明人： Larry Wagner ,  Ralph S. Smith ,  Daniel R. Cox

IPC分类号： H04M11/06

CPC分类号： H04M11/062 ,  H04M11/066

摘要： A transceiver providing simultaneous transfer of control information with voice and data over a public switched telephone network line is disclosed. In a typical system application, the transceiver is coupled to a public switched telephone network (PSTN) via a single telephone line. The transceiver includes logic for generating control information and for combining the control information with voice signals or data signals for transmission and reception through the PSTN using a single telephone line. The present invention provides a PSTN channel having two component subchannels, a main channel and a side channel. The main channel is provided for the transfer of voice signals and data signals at the same time the side channel is transferring control information and/or additional data signals. The control information transferred on the side channel is used primarily for selecting the transfer of either voice signals or data signals on the main channel. By providing a separate and independent side channel for controlling the main channel, the present invention eliminates the inherent delays caused in the prior art design by switching between a voice transfer mode and a data transfer mode using a single channel. The present invention also allows the transfer of data signals on the side channel simultaneously with the transfer of voice signals on the main channel. These advantages are provided by the present invention without redefining the bandwidth of the standard PSTN channel.

摘要翻译： 公开了一种通过公共交换电话网络线路同时传送控制信息与语音和数据的收发机。 在典型的系统应用中，收发器经由单个电话线耦合到公共交换电话网络（PSTN）。 该收发器包括用于产生控制信息和用于将控制信息与语音信号或数据信号组合以用于通过使用单个电话线通过PSTN进行发送和接收的逻辑。 本发明提供了具有两个分量子信道，主信道和侧信道的PSTN信道。 主通道用于传输语音信号和数据信号，同时侧信道正在传送控制信息和/或附加数据信号。 在侧信道上传送的控制信息主要用于选择主信道上的语音信号或数据信号的传送。 通过提供用于控制主信道的单独和独立的侧信道，本发明通过在语音传送模式和使用单个信道的数据传输模式之间切换来消除现有技术设计中引起的固有延迟。 本发明还允许在主信道上传输语音信号的同时在侧信道上传送数据信号。 这些优点由本发明提供，而不重新定义标准PSTN信道的带宽。