公开(公告)号：US20160258852A1

公开(公告)日：2016-09-08

申请号：US15061415

申请日：2016-03-04

申请人： Massachusetts Materials Technologies LLC

发明人： Simon C. Bellemare ,  Steven D. Palkovic ,  Phillip A. Soucy ,  Michael J. Tarkanian ,  Brendon M. Willey

IPC分类号： G01N3/46 ,  G06F17/50 ,  G01N3/60

CPC分类号： G01N3/46 ,  G01N3/60 ,  G01N2203/0078 ,  G01N2203/0098 ,  G01N2203/0244 ,  G06F17/5018 ,  Y02T10/82

摘要： An apparatus for performing a contact mechanics test on a substrate includes a stylus, a core configured to engage the stylus against the substrate, a stylus engagement mechanism configured to induce a contact load or a penetration depth to the stylus, a core engagement mechanism configured to maintain contact of the core and to move the core along the substrate surface, a frame configured to be fixed with respect to the apparatus or to be moved together with the core engagement mechanism as an assembly, a frame engagement mechanism configured to engage the frame with the substrate surface; and a substrate monitoring device configured to measure characteristics of substrate contact response and/or collect material machined from the substrate. Methods of performing a contact mechanics test are also provided.

摘要翻译： 用于在基板上进行接触力学试验的装置包括：触针，被配置为将触针接合在基板上的芯体;触针接合机构，被配置成引入触针的触点负载或穿透深度;芯接合机构， 保持芯的接触并使芯沿着衬底表面移动，框架被构造为相对于设备固定或与芯接合机构一起作为组件移动;框架接合机构，其构造成将框架与 基材表面; 以及衬底监测装置，其被配置为测量衬底接触响应的特性和/或收集从衬底加工的材料。 还提供了进行接触力学试验的方法。