公开(公告)号：US11031539B2

公开(公告)日：2021-06-08

申请号：US15773157

申请日：2016-11-04

Applicant: PIEZO STUDIO INC. ,  TOHOKU UNIVERSITY

Inventor： Akira Yoshikawa ,  Yuji Ohashi ,  Yuui Yokota ,  Kei Kamada ,  Masatoshi Ito ,  Kenji Inoue ,  Hiroyuki Amano

IPC: H01L41/187 ,  H01L41/113 ,  H01L41/053 ,  H03H3/04 ,  H03H9/02 ,  H01L41/047 ,  H01L41/09

Abstract: To provide a vibrator made of a piezoelectric crystal having a larger electromechanical coupling coefficient and a more satisfactory frequency-temperature characteristic than those of quartz, a vibrating piece (101) is made of a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal (0