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公开(公告)号:US07135405B2
公开(公告)日:2006-11-14
申请号:US10912442
申请日:2004-08-04
IPC分类号: H01L39/00
CPC分类号: H01L21/76898 , H01L21/288 , H01L21/76802 , H01L21/76838 , H01L21/76877 , Y10S438/94 , Y10S977/773
摘要: Embodiments of methods, apparatuses, devices, and/or systems for forming an interconnect are described.
摘要翻译: 描述了用于形成互连的方法,设备,设备和/或系统的实施例。