公开(公告)号：US4910965A

公开(公告)日：1990-03-27

申请号：US626059

申请日：1984-06-29

申请人： Robert J. Lepofsky ,  Bruce R. Andeen ,  Gerald R. Pruitt

发明人： Robert J. Lepofsky ,  Bruce R. Andeen ,  Gerald R. Pruitt

IPC分类号： F04B37/08

CPC分类号： F04B37/08 ,  Y10S417/901

摘要： The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively irradiating the primary cryopanel from a location external to the vacuum chamber. The radiation raises the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.

摘要翻译： 本发明公开了一种低温泵，其包括与低温散热器60相关的初级冷冻板67，低温散热器60具有用于吸附第一低沸点气体的装置和与散热器60相关联的次级冷冻板80以及具有冷凝装置 高沸点气体。 存在用于从真空室外部的位置选择性地照射初级低温板的装置90。 辐射将冷冻板的温度提高到高于使所述第一气体从所述冷冻板中解吸所必需的温度，同时对较高温度的散热器的容量具有最小的影响。