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公开(公告)号:US08049254B2
公开(公告)日:2011-11-01
申请号:US12408992
申请日:2009-03-23
IPC分类号: H01L29/76
CPC分类号: H01L21/30608 , H01L21/823807 , H01L21/823814 , H01L29/165 , H01L29/665 , H01L29/6656 , H01L29/66636 , H01L29/7848
摘要: A semiconductor device comprises a gate structure on a semiconductor substrate and a recessed region in the semiconductor substrate. The recessed region has a widest lateral opening that is near a top surface of the semiconductor substrate. The widest lateral opening undercuts the gate structure.
摘要翻译: 半导体器件包括半导体衬底上的栅极结构和半导体衬底中的凹陷区域。 凹陷区域具有靠近半导体衬底的顶表面的最宽的侧向开口。 最宽的侧向开口会削弱门结构。
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公开(公告)号:US20090174005A1
公开(公告)日:2009-07-09
申请号:US12408992
申请日:2009-03-23
IPC分类号: H01L27/092 , H01L29/06 , H01L21/4763
CPC分类号: H01L21/30608 , H01L21/823807 , H01L21/823814 , H01L29/165 , H01L29/665 , H01L29/6656 , H01L29/66636 , H01L29/7848
摘要: A semiconductor device comprises a gate structure on a semiconductor substrate and a recessed region in the semiconductor substrate. The recessed region has a widest lateral opening that is near a top surface of the semiconductor substrate. The widest lateral opening undercuts the gate structure.
摘要翻译: 半导体器件包括半导体衬底上的栅极结构和半导体衬底中的凹陷区域。 凹陷区域具有接近半导体衬底的顶表面的最宽的侧向开口。 最宽的侧向开口会削弱门结构。
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