Suspended cantilever waveguide
    13.
    发明授权

    公开(公告)号:US10571633B1

    公开(公告)日:2020-02-25

    申请号:US15852825

    申请日:2017-12-22

    Abstract: Cantilevered waveguides suspended above an air cavity in an underlying substrate are described. The waveguide is formed by patterning a waveguide layer in some embodiments, and the air cavity is formed by etching the substrate beneath the waveguide. The topside of the air cavity may be sealed by filling the openings used to etch the cavity with a sealant, such as optical epoxy. In some embodiments, the waveguide is a facet coupler, positioned at a chip facet.

    Cantilevers with one- or two-dimensional actuation for on-chip active waveguide coupling alignment

    公开(公告)号:US10345525B2

    公开(公告)日:2019-07-09

    申请号:US15639018

    申请日:2017-06-30

    Abstract: Photonic integrated circuits including controllable cantilevers are described. Such photonic integrated circuits may be used in connection with other optical devices, in which light is transferred between the photonic integrated circuit and one of these optical device. The photonic integrated circuit may comprise an optical waveguide having an end disposed proximate to a facet of the cantilever. The orientation of the cantilever may be actively controlled in one or two dimensions, thus adjusting the orientation of the optical waveguide. Actuation of the cantilever may be performed, for example, thermally and/or electrostatically. Orientation of the cantilever may be performed in such a way to align the optical waveguide with an optical device.

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