公开(公告)号：US20200089192A1

公开(公告)日：2020-03-19

申请号：US16132142

申请日：2018-09-14

Applicant: ASM IP Holding B.V.

Inventor： Chris de Ridder

IPC: G05B19/4097

Abstract: The invention relates to a cassette supply system to store and handle cassettes for substrates and a processing apparatus for processing substrates equipped with said system. The system having a cassette storage provided with base plate constructed and arranged to support cassettes. Also a cassette handler with an end effector with at least one protrusion to support and position the cassette on the end effector is provided to transfer cassettes to and from the base plate. The base plate may be provided with a substantially flat surface to support the cassettes.