公开(公告)号：US10801106B2

公开(公告)日：2020-10-13

申请号：US15380557

申请日：2016-12-15

Applicant: ASM IP HOLDING B.V.

Inventor： Ryoko Yamada ,  Jun Kawahara ,  Kazuo Sato

IPC: C23C16/44 ,  C23C16/455 ,  B05B16/60 ,  H01J37/32

Abstract: A shower plate adapted to be installed in a plasma deposition apparatus including a gas inlet port, a shower head, a reaction chamber and an exhaust duct, the shower plate being adapted to be attached to the showerhead and having: a front surface adapted to face the gas inlet port; and a rear surface opposite to the front surface, wherein the shower plate has multiple apertures each extending from the front surface to the rear surface, and wherein the shower plate further has at least one aperture extending from the front surface side of the shower plate to the exhaust duct.

公开(公告)号：USD834686S1

公开(公告)日：2018-11-27

申请号：US29587855

申请日：2016-12-15

Applicant: ASM IP HOLDING B.V.

Designer： Ryoko Yamada ,  Jun Kawahara ,  Kazuo Sato

公开(公告)号：USD785766S1

公开(公告)日：2017-05-02

申请号：US29568143

申请日：2016-06-15

Applicant: ASM IP Holding B.V.

Designer： Kazuo Sato

公开(公告)号：USD753269S1

公开(公告)日：2016-04-05

申请号：US29514264

申请日：2015-01-09

Applicant: ASM IP Holding B.V.

Designer： Takayuki Yamagishi ,  Kazuo Sato ,  Naoto Tsuji

公开(公告)号：USD724701S1

公开(公告)日：2015-03-17

申请号：US29481312

申请日：2014-02-04

Applicant: ASM IP Holding B.V.

Designer： Takayuki Yamagishi ,  Kazuo Sato ,  Naoto Tsuji

公开(公告)号：US11149350B2

公开(公告)日：2021-10-19

申请号：US15867669

申请日：2018-01-10

Applicant: ASM IP HOLDING B.V.

Inventor： Wataru Adachi ,  Kazuo Sato

IPC: C23C16/455 ,  C23C16/50 ,  C23C16/458 ,  H01L21/02

Abstract: A shower plate for a plasma deposition apparatus, the shower plate including: a plurality of apertures each extending from a rear surface of the shower plate to a front surface for passing a carrier gas therethrough in this direction to a chamber, a plurality of first apertures each extending from a first connecting aperture to an inner part of the front surface for passing gas therethrough in this direction to the chamber, and a plurality of second apertures each extending from a second connecting aperture to an outer part of the front surface for passing gas therethrough in this direction to the chamber, wherein the first connecting aperture connects the first apertures to at least one first aperture extending from a sidewall side of the shower plate and the second connecting aperture connects the second apertures to at least one second aperture extending from the sidewall side.

公开(公告)号：USD720838S1

公开(公告)日：2015-01-06

申请号：US29481301

申请日：2014-02-04

Applicant: ASM IP Holding B.V.

Designer： Takayuki Yamagishi ,  Kazuo Sato ,  Naoto Tsuji