公开(公告)号：US09648714B2

公开(公告)日：2017-05-09

申请号：US14388742

申请日：2013-02-06

Applicant: ASML Netherlands B.V.

Inventor： Wilbert Jan Mestrom ,  Gerardus Hubertus Petrus Maria Swinkels

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/001 ,  H05G2/005 ,  H05G2/008 ,  Y10T137/0318 ,  Y10T137/794

Abstract: A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location, and a fuel contamination control arrangement (44) which separates contamination particles from the fuel. The contamination control arrangement comprises at least one acoustic filter. The acoustic filter may apply an acoustic standing wave to the fuel. Also disclosed is a method of controlling contamination in such a fuel supply.