公开(公告)号：US10461490B2

公开(公告)日：2019-10-29

申请号：US16143018

申请日：2018-09-26

Applicant: ASML Netherlands B.V.

Inventor： Yongfeng Ni

IPC: H01S3/067 ,  G02F1/365 ,  H01S3/094 ,  H01S3/10 ,  G03F7/20 ,  G03F9/00 ,  G02F1/35

Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.