公开(公告)号：US20190086817A1

公开(公告)日：2019-03-21

申请号：US15711678

申请日：2017-09-21

Applicant: ASML, Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: G03F7/20

CPC classification number: G03F7/70841 ,  G03F7/70033 ,  H05G2/005 ,  H05G2/006

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.